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Detection of Fatigue Degradation in Functional Thin Surface Film Layer and Its Inspection System

功能性薄膜层疲劳退化检测及其检测系统

基本信息

批准号：
02555147
负责人：
HIGO Yakichi
金额：
$ 8.9万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至 1991
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02555147/
关键词：
Thin film Fatigue Bond strength Indenter Wave analysis 薄膜接合微小損傷疲労劣化

项目摘要

Functional surface films have been practically used in the field of High-Tech electronics devices and as protective coating materials of the products which suffer from corrosive environment. Such thin surface films are inevitably exposed to the condition of cyclic strain resulting from various kinds of heat treatment in their production process, and this induce the cracking and/or decohesion of the film. However, no inspection method has been developed in order to evaluate the important mechanical properties of the film such as fatigue strength or bond strength. The aim of the present research is to develop the noble testing method to examine the fatigue properties of the thin surface film.The indentation loading which has been used for hardness measurement was evolved into the cyclic loading system to the specimen surface using a ball indenter. This succeeded in developing intensively cyclically strained micron-scale region beneath the specimen surface. An age-hardened aluminum alloy was cyclically loaded in this testing system, and the formation of the selective fatigued region (Persistent Slip Band) was successfully recognized at the expected position. The position was consistent with the theoretical calculation.A non-linear component, corresponding to the cyclic plastic strain was extract from the experimentally measured stress-strain response using an acoustic wave analysis method. It was demonstrated that the non-linear component relate to the film thickness and the fretting condition between the film and the ball. Constructing databases for various kinds of films is required to improve the reliability of the presented testing method.

功能表面膜已在高科技电子器件领域得到实际应用，并作为耐腐蚀环境产品的保护涂层材料。这种表面薄膜在生产过程中不可避免地受到各种热处理引起的循环应变的影响，从而导致薄膜的开裂和/或脱粘。然而，目前还没有开发出一种检测方法来评估薄膜的重要力学性能，如疲劳强度或结合强度。本研究的目的是开发一种检测表面薄膜疲劳性能的优良测试方法。硬度测量用的压痕加载已演变为用球压头对试样表面进行循环加载。这成功地在试样表面下形成了密集的循环应变微米级区域。在此测试系统中对时效硬化铝合金进行循环加载，在预期位置成功识别出选择性疲劳区（持续滑移带）的形成。该位置与理论计算一致。利用声波分析方法从实验测量的应力-应变响应中提取出与循环塑性应变相对应的非线性分量。结果表明，非线性分量与薄膜厚度和薄膜与球之间的微动状态有关。为了提高所提出的测试方法的可靠性，需要对不同类型的薄膜构建数据库。