Multiaxis Nanofabrication Machine

TU Ilmenau成立的研究培训小组“基于针尖和激光的扩展宏观工作区域的3D纳米制造(NanoFab)”在基础研究的第一个应用阶段取得了出色的成果，该研究将先进的纳米制造技术与纳米定位和纳米测量机器(NPMM)的出色能力相结合。特别是，将NPMM增加两个转动自由度的研究工作扩展为第一个结合共焦微传感器的五轴NPMM演示器的研究工作，以及实现纳米压印模型的第一批结果，显示了巨大的潜力。转让项目的目的是将研究培训小组中展示的概念验证在一种具有显著提高的计量性能的多轴纳米加工机器的新原型中实施，并与应用合作伙伴一起进行测试。这是为了展示高精度测量的一个主要计量问题的解决方案，特别是非球面和自由曲面等精密光学表面的测量。对于目前的研究培训小组来说，这也提供了在这种表面上显著推进纳米制造的可能性。这种新方法的核心是将带有半球镜的两轴旋转运动学和集成的三轴显微干涉仪与新的四面体纳米定位和纳米测量机器相结合，以及集成各种纳米探针传感器或纳米工具的可能性。

The Research Training Group "Tip- and laser-based 3D nanofabrication in extended macroscopic working areas (NanoFab)" established at TU Ilmenau has achieved excellent results in its first application phase in basic research on the synergetic combination of advanced nanofabrication techniques with the outstanding capabilities of nanopositioning and nanomeasuring machines (NPMM). In particular, the research work on expanding the NPMM by two additional rotational degrees of freedom to a first 5-axis NPMM demonstrator combined with a confocal micro-sensor and the first results of the implementation of a nanoimprint mod-ule show the great potential. The aim of the transfer project is to implement the proof-of-con-cept shown in the Research Training Group in a new prototype of a multi-axis nanofabrication machine with significantly increased metrological properties and to test it together with the ap-plication partner. This is intended to demonstrate the solution to a major metrological problem of high-precision measurement, especially of precision optical surfaces such as aspheres and free-form surfaces. For the current Research Training Group, this also offers the possibility of significantly advancing nanofabrication on such surfaces. At the centre of the novel approach is the combination of a two-axis rotation kinematics with hemisphere mirror and integrated 3-axis microinterferometer with a new tetrahedron nanopositioning and nanomeasuring machine and the possibility of integrating various nanoprobe sensors or nanotools.