Multiaxis Nanofabrication Machine

多轴纳米加工机

• 批准号: 523923714
• 负责人: Professor Dr.-Ing. Thomas Fröhlich
• 金额: --
• 依托单位: Institut für Prozessmess- und Sensortechnik
• 依托单位国家: 德国
• 项目类别: Research Grants (Transfer Project)
• 资助国家: 德国
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/523923714?language=en
• 关键词: Multiaxis; Nanofabrication; Machine

The Research Training Group "Tip- and laser-based 3D nanofabrication in extended macroscopic working areas (NanoFab)" established at TU Ilmenau has achieved excellent results in its first application phase in basic research on the synergetic combination of advanced nanofabrication techniques with the outstanding capabilities of nanopositioning and nanomeasuring machines (NPMM). In particular, the research work on expanding the NPMM by two additional rotational degrees of freedom to a first 5-axis NPMM demonstrator combined with a confocal micro-sensor and the first results of the implementation of a nanoimprint mod-ule show the great potential. The aim of the transfer project is to implement the proof-of-con-cept shown in the Research Training Group in a new prototype of a multi-axis nanofabrication machine with significantly increased metrological properties and to test it together with the ap-plication partner. This is intended to demonstrate the solution to a major metrological problem of high-precision measurement, especially of precision optical surfaces such as aspheres and free-form surfaces. For the current Research Training Group, this also offers the possibility of significantly advancing nanofabrication on such surfaces. At the centre of the novel approach is the combination of a two-axis rotation kinematics with hemisphere mirror and integrated 3-axis microinterferometer with a new tetrahedron nanopositioning and nanomeasuring machine and the possibility of integrating various nanoprobe sensors or nanotools.

在TU Ilmenau成立的研究培训小组“扩展宏观工作区域中基于尖端和激光的3D纳米加工（NanoFab）”在其第一个应用阶段取得了优异的成绩，该阶段的基础研究是先进的纳米加工技术与纳米定位和纳米测量机（NPMM）的杰出能力的协同结合。特别是，将NPMM扩展两个额外的旋转自由度的研究工作，使第一个与共焦微传感器相结合的5轴NPMM演示器以及纳米压印模块实施的第一批结果显示了巨大的潜力。该转让项目的目的是在具有显著增加的可重复性的多轴纳米纤维机器的新原型中实施研究培训组中所示的概念验证，并与应用合作伙伴一起对其进行测试。这是为了证明解决高精度测量的主要问题，特别是精密光学表面，如非球面和自由曲面。对于目前的研究培训小组，这也提供了在这种表面上显着推进纳米纤维的可能性。该新方法的中心是将具有半球镜的双轴旋转运动学和集成的3轴显微干涉仪与新的四面体纳米定位和纳米测量机相结合，并可能集成各种纳米探针传感器或纳米工具。