Development of Precision Straightness Measuring System

精密直线度测量系统的开发

• 批准号: 02650101
• 负责人: MITSUI Kimiyuki
• 金额: $ 1.09万
• 依托单位: Faculty of Science and Technology, Keio University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1990
• 资助国家: 日本
• 起止时间: 1990 至 1991
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02650101/
• 关键词: Precision Metrology; Moving Accuracy; Machine Tool; Straightness; Sensor; 微小変位計; 微動ステ-ジ

1) In this study, at first the field survey for the development of new measuring method was carrried out. By the survey, it has been made clear that compensation of form error of strainghtedge which is used for measurement is inevitable for the precision measurement for the accuracy of precision machine tools or measuring instruments. From this stand point, new measuring method for straightness of motion has been proposed. A computer simulation shows that the measuring method has capability of measuring accuracy in the range of 0.01 mum.2) A capacitive type precision displacement sensor which is used for the straightness measurement has been developed. The basic characteristic such as resolution, lineality and frequency response were evaluated. The spatial frequency characteristic of the sensor has been investigated by computer simulation and experiment also. In the past, the spatial frequency of capacitive type displacement sensor was not clear.3) Newly development straightness measuring method has been applied for the measurement of accuracy of coordinate measuring machine, and the results shows the measuring method conforms for the accuracy evaluation of precise machines.

1)在本研究中，首先为开发新的测量方法进行了实地调查。通过调查，明确了用于测量的应变边缘的形状误差补偿是精密机床或测量仪器精度测量的必然要求。从这个角度出发，提出了一种新的运动直线度测量方法。计算机仿真结果表明，该测量方法的测量精度在0.01 μ m范围内。2)研制了一种用于直线度测量的电容式精密位移传感器。对其分辨率、线性度和频响等基本特性进行了评价。通过计算机仿真和实验对传感器的空间频率特性进行了研究。过去，电容式位移传感器的空间频率并不明确。将新开发的直线度测量方法应用于三坐标测量机的精度测量，结果表明该测量方法符合精密机械精度评价的要求。

项目成果

三井 公之: "画像処理によるきさげ加工面の認識" 日本機械学会論文集(C)58ー546. 626-632 (1992)

Kimiyuki Mitsui：“通过图像处理识别刮擦表面”，日本机械工程师学会汇刊 (C) 58-546 (1992)。

K. Mitsui: "Precision Measurement of Linear Motion of Machine Table" Pre-print of JSPE Autumn annual meeting. 793-794 (1990)

K. Mitsui：《机床工作台直线运动的精密测量》JSPE秋季年会预印本。

三井 公之: "画像処理によるきさげ加工面の認識" 日本機械学会論文集(C). 58ー546. 626-632 (1992)

Kimiyuki Mitsui：“通过图像处理识别刮擦表面”，日本机械工程师学会汇刊 (C) 58-546 (1992)。

K. Mitsui: "Automatic Recognition for the Bearing of Scraped Surfaces by Image Processing Technique" Trans. of JSME. 58-546(C). 626-632 (1992)

K. Mitsui：“通过图像处理技术自动识别刮擦表面的轴承”，Trans。

三井 公之: "直線運動精度の精密計測(第1報)" 1990年度精密工学会秋季大会学術講演会講演論文集. 793-794 (1990)

三井公之：《直线运动精度的精密测量（第1次报告）》1990年日本精密工程学会秋季会议学术会议论文集793-794（1990）。