Development of Precision Straightness Measuring System

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1) In this study, at first the field survey for the development of new measuring method was carrried out. By the survey, it has been made clear that compensation of form error of strainghtedge which is used for measurement is inevitable for the precision measurement for the accuracy of precision machine tools or measuring instruments. From this stand point, new measuring method for straightness of motion has been proposed. A computer simulation shows that the measuring method has capability of measuring accuracy in the range of 0.01 mum.2) A capacitive type precision displacement sensor which is used for the straightness measurement has been developed. The basic characteristic such as resolution, lineality and frequency response were evaluated. The spatial frequency characteristic of the sensor has been investigated by computer simulation and experiment also. In the past, the spatial frequency of capacitive type displacement sensor was not clear.3) Newly development straightness measuring method has been applied for the measurement of accuracy of coordinate measuring machine, and the results shows the measuring method conforms for the accuracy evaluation of precise machines.