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Development of a Measuring Apparatus for Profile and dimension of Micro Parts

微型零件外形尺寸测量仪的研制

基本信息

批准号：
10650121
负责人：
MITSUI Kimiyuki
金额：
$ 2.24万
依托单位：
Keio University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 1999
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10650121/
关键词：
Measurement Accuracy Micro parts Piezo electric actuator Micro electric discharge machining 放電加工

项目摘要

For the inspection and measurement of micro parts, measuring methods for the profile and dimension including geometrical deviations such as straightness, circularity and perpendicularity are needed. It is thought that a small three-dimensional profile measuring apparatus with microprobe can be utilized as the measuring method for this purpose. In this research a new three-dimensional profile measuring apparatus which has non-contact probe detecting proximity to measuring object through tunneling effect is described in detail. Then the validity of the measuring apparatus is shown through several specimens like roughness standard, micro hole and groove.Tunnel effect is observed when gap between surface and probe is less than 1 nm. In this research the tunnel effect is used to detect the contact of prove and surface, because no complicated devices are needed and measurement on the sloping surface is possible.The trial apparatus is composed of X-Y-Z precision stages with linear encoders, θ (rotating) stage with rotary encoder and a personal computer controlling these stages through GP-IB interface. The probe is mounted to Z stage through piezo electric actuators so that it must be precisely controlled.The probes are most important components of this measuring method. Fabrication method of probes suitable for measurement of each microparts by micro die-sinking electro discharge machining has also been developed.

在微小型零件的检测中，需要对微小型零件的轮廓和尺寸进行测量，包括直线度、圆度、不规则度等几何误差的测量。认为可以利用带有微探针的小型三维轮廓测量装置作为用于此目的的测量方法。本文详细介绍了一种新型的三维轮廓测量装置，该装置采用非接触式测头，通过隧道效应检测被测物体的接近程度。通过对粗糙度标准件、微孔和沟槽的测试，验证了该测量装置的有效性，当探针与表面之间的间隙小于1 nm时，观察到隧道效应。本研究利用隧道效应来检测试样与表面的接触，不需要复杂的测量装置，可以在倾斜表面上进行测量，实验装置由带有直线编码器的X-Y-Z精密工作台、带有旋转编码器的θ（旋转）工作台和通过GP-IB接口控制这些工作台的PC机组成。测头通过压电驱动器安装在Z工作台上，因此必须对其进行精确控制，测头是这种测量方法的最重要组成部分。还开发了适用于各种微小型零件测量的微模具电火花加工探针的制作方法。