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Development of a new displacement-measuring ultrasonic sensor based on astigmatic focus error detection

基于像散聚焦误差检测的新型位移测量超声波传感器的研制

基本信息

批准号：
08555039
负责人：
MITSUI Kimiyuki
金额：
$ 6.4万
依托单位：
KEIO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1996
资助国家：
日本
起止时间：
1996 至 1997
项目状态：
已结题

项目摘要

In-process measurement is generally considered to be the most functional method for obtaining high-dimensional accuracy during cutting and grinding operations, with contact type sizing devices being commonly used when such accuracy is required. Optical techniques are not suitable for use in these operations due to wet conditions arising from lubricant application.In contrast, corresponding ultrasonic techniques can be effectively applied when fully immersed in a liquid, though another problem occurs regarding measurement accuracy of conventional ultrasonic displacement sensors which employ the pulse-echo method. The resolution is, typically, 2-20mum, which is not adequate to meet desired in-process measurement standards.This drawback in measurement resolution led us to develop an entirely new type of ultrasonic displacement measurement method, i.e., we built the first-ever displacement-measuring ultrasonicsensor whose operation is based on the principle of astigmatic focus error detection. Basically, the sensor incorporates a cylindrical acoustic lens that detects a change in distance between an acoustic objective lens and target surface converting it to an equivalent change in sound pressure distribution which is measured by a quadrant type ultrasonic detector. Here, we describe in detail the measuring principle of this new method and the basic analysis applied in the design method, after which results of experimental evaluations are presented demonstrating method/system suitability to meet its intended application as an in-process measurement device possessing high-dimensional accuracy during cutting or grinding operations.

过程中测量通常被认为是在切割和磨削操作期间获得高尺寸精度的最实用的方法，当需要这种精度时，通常使用接触式尺寸测量装置。由于润滑剂的应用会导致潮湿的环境，因此光学技术不适合用于这些操作。相反，当完全浸入液体中时，可以有效地应用相应的超声波技术，尽管采用脉冲回波方法的传统超声波位移传感器的测量精度会出现另一个问题。分辨率通常为2- 20 μ m，这不足以满足所需的过程中测量标准。测量分辨率的这一缺点促使我们开发了一种全新类型的超声位移测量方法，即，我们研制了第一台基于光学聚焦误差检测原理的位移测量超声波传感器。基本上，该传感器包括圆柱形声透镜，其检测声物镜透镜和目标表面之间的距离变化，将其转换为声压分布的等效变化，该声压分布由象限型超声检测器测量。在这里，我们详细描述了这种新方法的测量原理和应用在设计方法中的基本分析，之后给出了实验评估的结果，证明方法/系统的适用性，以满足其预期的应用程序作为一个过程中的测量设备具有高尺寸精度在切割或磨削操作。