Development of a micro-region diffraction equipment by synchrotron microbeam

同步加速器微束微区衍射装置的研制

• 批准号: 03558012
• 负责人: OHSUMI Kazumasa
• 金额: $ 10.3万
• 依托单位: National Laboratory for High Energy Physics
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1991
• 资助国家: 日本
• 起止时间: 1991 至 1992
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03558012/
• 关键词: Synchrotron Radiation; Microbeam; Micro-region; Diffraction; Structure Analysis; Texture Analysis; 構造解析; マイクロビ-ム

A diffraction equipment for micro-region in a thin section has been developed by using polychromatic synchrotron radiation(SR). An imaging plate(IP;Fuji Co.,Ltd.) was employed for a detector.A software system has also been completed by changing the system developed previously for sub-micrometer-sized single crystal.Due to limited space around beamline 4B of the Photon Factory, KEK, Tsukuba, a micro-pinhole was used for making very fine incident SR.Since it is most important to achive a very low background level of the experiment, the equipment was placed in vacuum for avoiding air scattering. An IP readout-system was also installed in the vacuum chamber. Therefore, even though the equipment is placed in a vacuum chamber, a diffraction pattern of different region or at different crystal orientation can be obtained without opening the chamber.Micro-pinholes of 5 and 10mu m were made by ourselves and set just after a collimator. The distance between the pinhole and the thin section is 7mm, the detector covers -30 to 165 degrees in two-theta range with camera radius of 100mm.This apparatus with a 10mum pinhole was initially applied to olivine (Mg_2SiO_4) grains, considered as different origins, included in a thin section of meteorite, and also to micrometer-sized aluminum g rains on a semiconductor material. Each diffraction pattern of different olivine grains shows different X-ray diffraction profile according to its origin. An elongated diffraction pro-file of Al grain was observed together with sharp diffraction profile from Si(100) substrate in a case of the semiconductor.

本文介绍了一种利用多色同步辐射（SR）衍射薄切片微区的装置。成像板（IP;Fuji Co.，（香港）由于日本筑波光电公司光子工厂的4 B光束线周围空间有限，为了制作非常精细的入射SR，采用了一个微小的针孔。由于获得非常低的本底水平对实验至关重要，因此将设备放置在真空中以避免空气散射。在真空室中还安装了IP读出系统。因此，即使将装置置于真空室中，也可以在不打开真空室的情况下获得不同区域或不同晶向的衍射图样。针孔与薄片之间的距离为7 mm，探测器在2 θ范围内覆盖-30至165度，摄像机半径为100 mm。该装置具有10 μ m针孔，最初应用于橄榄石（Mg_2SiO_4）颗粒，被认为是不同的起源，包括在陨石薄片中，也用于半导体材料上的微米级铝颗粒。不同橄榄石晶粒的X射线衍射图根据其来源不同而呈现出不同的衍射轮廓。在半导体的情况下，观察到Al颗粒的细长衍射轮廓以及Si（100）衬底的尖锐衍射轮廓。

项目成果

Kzumasa OHSUMI(大隅 一政): "Characterization of 5-μm-sized icosahedral chemical vapor deposited diamond by synchrotron x-ray diffraction with Laue method" Review of scientific Instruments. 63(1). 1181-1184 (1992)

Kzumasa OHSUMI：“通过劳厄方法同步加速器 X 射线衍射表征 5 微米大小的二十面体化学气相沉积金刚石”科学仪器评论 63(1) (1992)。

K. Ohsumi, K. Hagiya and M. Ohmasa: "Development of a system to analyze the structure of a submicrometer-sized single crystal by synchrotron X-ray diffraction" J. Appl. Cryst.24. 340-348 (1991)

K. Ohsumi、K. Hagiya 和 M. Ohmasa：“开发通过同步加速器 X 射线衍射分析亚微米尺寸单晶结构的系统”J. Appl。

Kazumasa Ohsumi他6名: "Characterization of 5-μm-Sized icosahedral chemical vapordaposited diamond by Synchrotron X-raydiffraction with Laue method." Rev.Sci.Instrum.63(1). 1181-1184 (1992)

Kazumasa Ohsumi 和其他 6 人：“采用 Laue 方法通过同步辐射 X 射线衍射表征 5 微米尺寸的二十面体化学气相沉积金刚石。”Rev.Sci.Instrum.63(1) (1992)。

Kzumasa OHSUMI(大隅 一政): "Developmeut of a system toanalyse the structure of a submicrometer-sized single crystal by synchrotron x-ray diffraction" Journal of Applied crystallography. 24. 340-348 (1991)

Kzumasa OHSUMI：“开发通过同步加速器 X 射线衍射分析亚微米尺寸单晶结构的系统”应用晶体学杂志 24. 340-348 (1991)。

K. Ohsumi, T. Takase, K. Hagiya, Y. Shimizugawa, M. Miyamoto, Y. Mitsuda and M. Ohmasa: "Characterization of 5-mum-sized icosahedral chemical vapor deposited diamond by synchrotron X-ray diffraction with Laue method" Rev. Sci. Instum.63(1). 1181-1184 (199

K. Ohsumi、T. Takase、K. Hagiya、Y. Shimizukawa、M. Miyamoto、Y. Mitsuda 和 M. Ohmasa：“通过劳厄法同步加速器 X 射线衍射表征 5 微米尺寸的二十面体化学气相沉积金刚石