DEVELOPMENT OF MICRO VACUUM PUMP USING A MICROMACHINING TECHNIQUE

采用微机械加工技术开发微型真空泵

• 批准号: 03650220
• 负责人: INABA Seiki
• 金额: $ 1.41万
• 依托单位: GIFU NATIONAL COLLEGE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1991
• 资助国家: 日本
• 起止时间: 1991 至 1993
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03650220/
• 关键词: Micromachining; Micro Vacuum Pump; Optical Actuator; Shape-memory Alloy; Laser Diode; Photothermal Effect; Micro Cantilever; Water Flow Pump; 真空ポンプ; レーザ真空計; 光熟効果; 液中振動; レ-ザ

In order to develop a micro vacuum pump, basic experiment has been carried out from following four standing points of view.1) In order to measure the pressure in the micro space, an optical vacuum gauge using a photothermal effect has been developed by fabricating a micro cantilever with a micromachining technique. The pressure in the low vacuum region can be determined exactly with measuring the resonance frequency of the canti-lever. The theoretical analysis was also performed.2) An optical miniature actuator for driving the pump has been developed utilizing a shape-memory alloy. With the irradiation power of 300 mW, the displacement of 3 mm and the generative force of 2.2 N were obtained.3) The micromachining technique was applied to the fabrication of the micro vacuum gauge. A micro photolithography for etching metals was used for making the miniature pump.4) The miniature pump for flowing liquid was drived by the optical minature actuator. The flow rate of 140 ul/min was obtained. The pumping up pressure and the pumping out pressure were 1000 and 1500 mmH_2O, respectively.

为了研制微型真空泵，从以下四个方面进行了基础实验：1）为了测量微小空间的压力，利用微机械加工技术制作了一个微悬臂梁，研制了一种光热效应的光学真空计。通过测量杠杆的谐振频率，可以准确地确定低真空区的压强。利用形状记忆合金研制了一种用于驱动泵浦的光学微型驱动器。在300 mW的辐照功率下，获得了3 mm的位移和2.2 N的产生力。3）将微加工技术应用于微型真空计的制作。利用金属微蚀刻光刻技术制作了微型泵。4）利用光学微驱动器驱动微型液体泵。获得140 μ l/min的流速。泵上压力和泵出压力分别为1000和1500 mmH_2O。

项目成果

稲葉成基: "真空中におけるホトサーマル振動周波数の励振入力依存性" 真空. 34. 381-383 (1991)

Inaba, Seiki：“真空中光热振动频率的激发输入依赖性”真空。 381-383 (1991)

稲葉成基: "真空中におけるホトサーマル周波数の〓振入力依存性" 真空. 34. 381-383 (1991)

Seiki Inaba：“真空中光热频率对振荡输入的依赖性”真空。381-383 (1991)

S.Inaba: "Miniature actuator driven photothermally using a shape-memory alloy" Rev.Sci.Instrum. Vol.64, No.6. 1633-1635 (1993)

S.Inaba：“使用形状记忆合金进行光热驱动的微型执行器”Rev.Sci.Instrum。

S.Inaba: "Liquid density sensing by using a photothermal vibration" Sonsors & Actuators A. 33. 163-166 (1992)

S.Inaba：“利用光热振动进行液体密度传感” Sonsors

S.Inaba: "Dependence of resonance frequency of a membrane vibrated photothermally on pressure and geomotry in a low vacuum region" Jpn.J.Appl.Phys.32. 1001-1004 (1993)

S.Inaba：“低真空区域光热振动膜的共振频率对压力和几何运动的依赖性”Jpn.J.Appl.Phys.32。