DEVELOPMENT OF OPTICAL ACTUATORS FOR DRIVING MICROMACHINES

用于驱动微型机器的光学执行器的开发

• 批准号: 06650293
• 负责人: INABA Seiki
• 金额: $ 1.41万
• 依托单位: GIFU NATIONAL COLLEGE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06650293/
• 关键词: Microactuator; Microcantilver; Optical Actuator; Optical Fiber; Laser Diode; Photothermal Effect; Micro Vibrator; Micro Gripper

In order to develop optical actuators for driving micromachines, following studies have been carried out.1)The photothermal vibration for shape-memory alloys was investigated. The amplitude was very large compared with the other conventional materials. The temperature characteristic of alloy was measured.2)The optical vibrator using shape-memory alloy and bias spring was developed. The displacement of 3 mm and the generation force 2N were obtained with irradiation of laser power of 300mW.A miniature water flow pump was driven with this actuator.3)The photothermal rotation of a cantilver around z-axis was investigated. The cantilever was irraditaed with two laserrs of which phases were differentiall by 90 dgree.4)The micro-pincette was constructed from two flat optical fiber cables. A clad layr was eliminated from the fiber-tip, and a microcantilever was fabricated. Using these two cantilver, a sphere of 0.1 mm was gripped in liquid.5)The micro-grippeer was developed. Several shape-memory wires were set up around the optical fiver. A sphere with a weight of 50g-w was gripped with irradiation laser power of 100mW.6)Several optical sensors were developed using the mechanical vibration of the laser-driven microcantilever fabricated from the optical fiber-tip.

为了开发用于驱动微机械的光致动器，本文开展了以下研究：1）研究了形状记忆合金的光热振动特性。与其他常规材料相比，振幅非常大。测量了合金的温度特性。2）研制了采用形状记忆合金和偏置弹簧的光学振动器。在300 mW的激光功率下，获得了3 mm的位移和2 N的产生力，并以此驱动了一台微型水流泵。3）研究了悬臂梁绕z轴的光热旋转。用相位相差90度的两束激光照射悬臂梁。4）微夹由两条扁平光纤构成。从光纤尖端去除包层，并制作微悬臂梁。利用这两个悬臂，在液体中夹持0.1mm的球体。5）研制了微夹持器。几根形状记忆导线被设置在光导纤维周围。用100 mW的激光功率对50 g-w的球体进行了夹持实验。6）利用激光驱动的光纤微悬臂梁的机械振动，研制了几种光学传感器。

项目成果

H.Kumazaki: "Temperature characteristics of vibration type sensor using micromachined optical fiber-tip" Opt.Rev.30・2. 135-138 (1996)

H.Kumazaki：“使用微加工光纤尖端的振动型传感器的温度特性”Opt.Rev.30・2（1996）。

H.Kumazaki: "Photomechanical Sensor Using a Photo thermal vibration of an optical fibor in liqaid" Tech. Digese. 13th Sems. Symp.41-44 (1995)

H.Kumazaki：“使用液体中光纤的光热振动的光机械传感器”技术。

H. Kumazaki: "Pressure deplndence of resonancy charaeleristics of the micwcanthenr fabricaled from opelcal fiber" Vacunm. ((印刷中))

H. Kumazaki：“由欧佩尔卡纤维制造的麦克风谐振特性的压力依赖性”Vacunm（（正在印刷中））

稲葉成基: "光学式アクチュエータのための形状記憶合金の真空中光熱変位" 真空. 37・3. 282-284 (1994)

Seiki Inaba：“光学执行器形状记忆合金在真空中的光热位移”37・3（1994）。

A.Shimaura: "Light driven detuators using shape‐memory alloy" Tech.Digest.14th Sensor Symp.259‐262 (1996)

A.Shimaura：“使用形状记忆合金的光驱动调节器”Tech.Digest.14th Sensor Symp.259-262 (1996)