DEVELOPMENT OF OPTICAL ACTUATORS FOR DRIVING MICROMACHINES

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In order to develop optical actuators for driving micromachines, following studies have been carried out.1)The photothermal vibration for shape-memory alloys was investigated. The amplitude was very large compared with the other conventional materials. The temperature characteristic of alloy was measured.2)The optical vibrator using shape-memory alloy and bias spring was developed. The displacement of 3 mm and the generation force 2N were obtained with irradiation of laser power of 300mW.A miniature water flow pump was driven with this actuator.3)The photothermal rotation of a cantilver around z-axis was investigated. The cantilever was irraditaed with two laserrs of which phases were differentiall by 90 dgree.4)The micro-pincette was constructed from two flat optical fiber cables. A clad layr was eliminated from the fiber-tip, and a microcantilever was fabricated. Using these two cantilver, a sphere of 0.1 mm was gripped in liquid.5)The micro-grippeer was developed. Several shape-memory wires were set up around the optical fiver. A sphere with a weight of 50g-w was gripped with irradiation laser power of 100mW.6)Several optical sensors were developed using the mechanical vibration of the laser-driven microcantilever fabricated from the optical fiber-tip.