Research on the micro turning process of optical fiber.

在本研究中，探讨了类似于车床加工金属材料的微细车削加工方法。加工对象为光纤等直径小于等于500 μm的玻璃棒，采用湿法刻蚀、干法刻蚀以及两者结合的技术，实现钻孔、小直径加工、推力钻加工和锥度加工。研究结果如下：1.研制了RIE干法刻蚀装置。光纤在CF4等离子体中同轴旋转。此外，还建立了湿法刻蚀的旋转轴进给计算机控制系统.利用湿法腐蚀技术进行了钻孔和小直径加工，并对车削加工中存在的问题进行了分析.实现了通过干法蚀刻的推力限制处理。微毛细管或光致抗蚀剂和Ni镀层被用作车削工艺中的干法蚀刻的掩模。此外，还实现了采用激光束光刻的掩模方法.通过旋转倾斜光纤作为放电电极，实现了锥形加工。锐角为15度，曲率半径约为200 nm.镍电镀和准分子激光也实现了钻孔加工。此外，还研究了利用光阱的技术.研究结果在论文中得到了展示。

In this study, the micro turning process method, which was similar to the lathe for metallic material, was examined. Processed objects are the glass rods of 500 μm diameter or less such as optical fibers.Wet etching, dry etching and the technique, which combined both, realize drilling, small diameter processing, thrust drill processing and taper processing. The research results are shown in the following.1. The apparatus using RIE dry etching was developed. An optical fiber is rotated coaxially in CF4 plasma. Furthermore, the computer control system with rotation and shaft feed was constructed for the wet etching.2. Drilling and small diameter processing by the wet etching were carried out, and the problem to the turning process was examined.3. A thrust limit processing by the dry etching was realized. A micro capillary or photo resist and the Ni plating was used as the mask for dry etching in the turning process. In addition, it was also realized on the masking method using laser beam lithography.4. By rotating in tilting optical fiber for the discharging electrode, taper processing was realized. The sharp angle was 15 degrees, and radius of curvatures was about 200nm.5. Ni plating and the excimer laser also realized drilling process. Moreover, the technique using the optical trap was also examined.6. The research results were shown in the paper.