DEVELOPMENT OF FIBER-SENSORS FOR DENSITY USING A MICROMACHINING TECHNIQUE

使用微加工技术开发光纤密度传感器

• 批准号: 07555080
• 负责人: INABA Seiki
• 金额: $ 1.22万
• 依托单位: GIFU NATIONAL COLLEGE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1997
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555080/
• 关键词: Photothermal Vibration; Pressure Sensor; Optical Fiber; Micromachine; Density Sensor; Viscosity Sensor; 光ファイバ

In order to develop laser-driven fiber sensors for gaseous or liquid density using a micromachinig technique, following studies have been carried out.1) A microccantilever rod comprised of the quartz core was fabricated by etching the clad layr from the optical fiber tip, and was vibrated photothermally using a laser diode. Optical systemd are simple compared with previous works, and may be useful for measurement of quatntities such as pressure, densiity, and viscosity. The complicated optical adjustment is unnecessary for accurate measurements in this system. The vibratiion of the quartz cantilever is stable and reproducible. The fluctuation of the resonance frequency is within 1 Hz.2) Effect of cantilver size of laser-driven fiber core was discussed.3) In order to develop fiber sensors for liquid density or liquid viscosity, resonance characteristics of photothermal vibration in liquid were measured.4) Detection including optical systems and computer systems were developed.

为了利用微机械技术开发激光驱动的气体或液体密度光纤传感器，进行了以下研究。1)通过刻蚀光纤尖端的包层制备石英芯组成的微悬臂棒，并利用激光二极管进行光热振动。光学系统与以前的工作相比是简单的，并且可以用于测量诸如压力，密度和粘度之类的量。在该系统中，为了精确测量，不需要进行复杂的光学调整。石英悬臂梁的振动是稳定的和可重复的。谐振频率的波动在1hz以内。2)讨论了悬臂尺寸对激光驱动光纤芯的影响。3)为了研制液体密度或液体粘度光纤传感器，测量了液体光热振动的共振特性。4)开发了包括光学系统和计算机系统在内的检测系统。

项目成果

H.Kumazaki: "Photomechanical sensor using a photothermal vibration of an optical fiber in liquid" Tech.Digest.13th Sensor Symp.41-44 (1995)

H.Kumazaki：“使用液体中光纤光热振动的光机械传感器”Tech.Digest.13th Sensor Symp.41-44 (1995)

熊崎 裕教: "膜圧測定のためのレーザ駆動ファイバコア振動子のサイズ効果" 真空. 40・3. 303-305 (1997)

Hironori Kumazaki：“用于膜压力测量的激光驱动光纤芯谐振器的尺寸效应”真空40・3。

H.Kumazaki: "Temperature characteristics of vibration type sensor using micromachined optical fiber-tip" Opt.Rev.30・2. 135-138 (1996)

H.Kumazaki：“使用微加工光纤尖端的振动型传感器的温度特性”Opt.Rev.30・2（1996）。

熊崎 裕教: "FCコネクタ装着型薄板ガラス振動子を用いた光学式膜厚測定" 真空. 41・3(印刷中). (1998)

Hironori Kumazaki：“使用配备 FC 连接器的薄玻璃谐振器进行光学薄膜厚度测量”真空 41・3（出版中）。

熊〓裕教: "FCコネクタ装着型薄板ガラス振動子を用いた光学式膜厚測定" 真空. 41・3(印刷中). (1998)

Hironori Kuma：“使用配备 FC 连接器的薄玻璃谐振器进行光学薄膜厚度测量”真空 41・3（出版中）。