PRODUCTION OF LASER-DRIVEN MICROMACHINES BY USING LASER MICRO-MANIPYULATION AND THREE-DIMENSION LASER BEAM LITHOGRAPHY

(1)光学陷阱和激光光刻光学系统的构建：采用两台波长为1064 nm、500 mW的YAG激光器和一台波长为325 nm、功率为20 mW的He-Cd激光器进行光刻。微结构对象可在任意位置通过激光自由移动、固定和成型。微球在紫外光聚合树脂液体上的光学陷阱通过将微球放置在紫外光聚合树脂液体上，并进行光学陷阱来制作以下微结构对象。(A)可以将微球固定在垂直延伸在载玻片上的柱子上。该系统对于构建球面透镜的微光学系统是有效的。(2)可以将微小的球面固定到光纤尖端。紫外光致聚合物树脂液滴的光陷成功地实现了紫外光致聚合物树脂微滴本身的光陷。这种被激光捕获的液滴被用作微型物体的粘合剂。微滴被输送并固定，以结合微球。通过相似的工艺，将多个微球连接在一起。(4)激光驱动微结构对象激光驱动聚苯乙烯乳胶球耦合光学陷阱。激光光刻制备的悬臂梁上的聚苯乙烯乳胶球被光热振动，但由于激光强度较弱，单模光纤的悬臂梁不能被驱动，未来必须构建能够实现三维陷阱的光学系统，以制造实际的微结构物体。

(1) The construction of the optical system for optical trap and laser lithographyTwo YAG lasers (1064nm wavelength, 500mW) for optical trap, and a He-Cd laser (325nm wavelength, 20mW) for laser lithography were used. The microstructure objects are freely moved, fixed, and molded by laser in the optional position. Manipulation under the microscope is possible and it is recorded by the digital camera.(2) The optical trap of micro spheres on the UV photopolymer resin liquidFollowing microstructure objects were fabricated by putting micro spheres on the UV photopolymer resin liquid, and doing the optical trap.(a) It was possible to fix the minute sphere to the column which is perpendicularly extended on the slide. This system is effective for the construction of the micro optical system of the sphere lens.(b)It was possible to fix the minute sphere to the optical fiber tip. This system is effective for raising optical incidence efficiency to the optical fiber.(3) The optical trap of the droplet of the UV photopolymer resinIt succeeds in doing the optical trap of micro droplet itself of the UV photopolymer resin. This droplet trappedby laserwas used as adhesive for micro objects. Micro droplet was transported and was fixed for combining the micro spheres. Doing similar processes, several micro spheres were connected.(4) Laser driven microstructure objectsPolystyrene latex sphere coupled optical trap was driven by laser. Polystyrene latex sphere on the cantilever beam fabricated by laser lithography was vibrated photothermally.However, the cantilever beam of the single-mode optical fiber was not driven because of weakness of laser intensity.In the future, the optical system of which the three-dimensional trap is possible must be constructed for the fabrication of practical microstructure objects.