PRODUCTION OF LASER-DRIVEN MICROMACHINES BY USING LASER MICRO-MANIPYULATION AND THREE-DIMENSION LASER BEAM LITHOGRAPHY

利用激光微操作和三维激光束光刻技术生产激光驱动微型机器

• 批准号: 10555083
• 负责人: INABA Seiki
• 金额: $ 4.99万
• 依托单位: GIFU NATIONAL COLLEGE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-10555083/
• 关键词: optical trap; lasermicromanipulation; three-dimensional laserbeam lithography; laser drive; micromachine; レーザマイクロマニビュレーション

(1) The construction of the optical system for optical trap and laser lithographyTwo YAG lasers (1064nm wavelength, 500mW) for optical trap, and a He-Cd laser (325nm wavelength, 20mW) for laser lithography were used. The microstructure objects are freely moved, fixed, and molded by laser in the optional position. Manipulation under the microscope is possible and it is recorded by the digital camera.(2) The optical trap of micro spheres on the UV photopolymer resin liquidFollowing microstructure objects were fabricated by putting micro spheres on the UV photopolymer resin liquid, and doing the optical trap.(a) It was possible to fix the minute sphere to the column which is perpendicularly extended on the slide. This system is effective for the construction of the micro optical system of the sphere lens.(b)It was possible to fix the minute sphere to the optical fiber tip. This system is effective for raising optical incidence efficiency to the optical fiber.(3) The optical trap of the droplet of the UV photopolymer resinIt succeeds in doing the optical trap of micro droplet itself of the UV photopolymer resin. This droplet trappedby laserwas used as adhesive for micro objects. Micro droplet was transported and was fixed for combining the micro spheres. Doing similar processes, several micro spheres were connected.(4) Laser driven microstructure objectsPolystyrene latex sphere coupled optical trap was driven by laser. Polystyrene latex sphere on the cantilever beam fabricated by laser lithography was vibrated photothermally.However, the cantilever beam of the single-mode optical fiber was not driven because of weakness of laser intensity.In the future, the optical system of which the three-dimensional trap is possible must be constructed for the fabrication of practical microstructure objects.

(1)光阱和激光光刻光学系统的结构采用两台YAG激光器（1064 nm波长，500 mW）作为光阱，一台He-Cd激光器（325 nm波长，20 mW）作为激光光刻。微结构物体在任意位置自由移动、固定并通过激光成型。显微镜下的操作是可能的，它是由数码相机记录。(2)微球在UV光致聚合物树脂液上的光阱通过将微球置于UV光致聚合物树脂液上，并进行光阱，制备了以下微结构物体。(a)可以将微小球体固定在载玻片上垂直延伸的柱上。该系统对球透镜微光学系统的构建是有效的。(b)It可以将微小球体固定到光纤尖端。该系统对于提高到光纤的光入射效率是有效的。(3)紫外光致聚合树脂液滴的光阱成功地实现了紫外光致聚合树脂微液滴本身的光阱。这种被激光捕获的液滴被用作微小物体的粘合剂。将微滴输送并固定以使微球结合。通过类似的过程，将几个微球连接起来。(4)激光驱动微结构物体用激光驱动聚苯乙烯乳胶球耦合光阱。利用激光光刻技术制作悬臂梁上的聚苯乙烯乳胶球，使其产生光热振动，而单模光纤的悬臂梁由于激光强度弱而无法驱动，为了制作实际的微结构物体，必须构建能够实现三维陷阱的光学系统。

项目成果

S.INABA, H.KUMAZAKI AND K.HANE: "FABRICATION OF MICRO STRUCTURE OBJECTS USING OPTICAL TRAP AND LASEER BEAM LITHOGRAPHY"Journal of the Japan Society for Technology of plasticity. Vol.40, No.466. 12-16 (1999)

S.Inaba、H.Kumazaki 和 K.HANE：“使用光学陷阱和激光束光刻技术制造微结构物体”日本塑性技术学会杂志。

稲葉 成基: "光トラップ法と光造形法を用いたマイクロ構造物の製作"塑性と加工(日本塑性加工学会誌). 40巻・466号. 12-16 (1999)

Seiki Inaba：“使用光学捕获和立体光刻技术生产微结构”《塑性与加工》（日本塑料加工学会杂志），第 40 卷，第 466 期。12-16（1999 年）。

稲葉成基: "光トラップ法と光造形法を用いたマイクロ構造物の製作"塑性と加工(日本塑性加工学会誌). 40・466. 12-16 (1999)

Shigeki Inaba：“使用光学捕获和立体光刻技术生产微结构”，《塑性与加工》（日本塑料加工学会杂志）40・466（1999）。