PRODUCTION OF LASER-DRIVEN MICROMACHINES BY USING LASER MICRO-MANIPYULATION AND THREE-DIMENSION LASER BEAM LITHOGRAPHY

(1)光阱和激光光刻光学系统的构建采用2台YAG激光器（波长1064nm， 500mW）作为光阱，1台He-Cd激光器（波长325nm， 20mW）作为激光光刻。微结构物体可自由移动、固定、激光在任意位置成型。在显微镜下操作是可能的，它是由数码相机记录。(2)微球在UV光聚合物树脂液上的光阱：将微球置于UV光聚合物树脂液上，进行光阱处理，制备出以下微结构物体。(a)可以将微小的球体固定在垂直延伸在滑块上的柱上。该系统对球面透镜微光学系统的构建是有效的。(b)可以将微小球体固定在光纤尖端。该系统对提高光纤的入射效率是有效的。(3)紫外光聚合物树脂微滴的光阱成功地完成了紫外光聚合物树脂微滴本身的光阱。这种被激光捕获的液滴被用作微物体的粘合剂。将微液滴进行输送和固定，使微球结合。做类似的过程，几个微球被连接起来。(4)激光驱动微结构对象采用激光驱动聚苯乙烯乳胶球耦合光阱。采用光热振动法对激光光刻悬臂梁上的聚苯乙烯乳胶球进行振动。然而，单模光纤的悬臂光束由于激光强度弱而无法驱动。在未来，为了制造实用的微结构物体，必须构建具有三维陷阱可能的光学系统。

(1) The construction of the optical system for optical trap and laser lithographyTwo YAG lasers (1064nm wavelength, 500mW) for optical trap, and a He-Cd laser (325nm wavelength, 20mW) for laser lithography were used. The microstructure objects are freely moved, fixed, and molded by laser in the optional position. Manipulation under the microscope is possible and it is recorded by the digital camera.(2) The optical trap of micro spheres on the UV photopolymer resin liquidFollowing microstructure objects were fabricated by putting micro spheres on the UV photopolymer resin liquid, and doing the optical trap.(a) It was possible to fix the minute sphere to the column which is perpendicularly extended on the slide. This system is effective for the construction of the micro optical system of the sphere lens.(b)It was possible to fix the minute sphere to the optical fiber tip. This system is effective for raising optical incidence efficiency to the optical fiber.(3) The optical trap of the droplet of the UV photopolymer resinIt succeeds in doing the optical trap of micro droplet itself of the UV photopolymer resin. This droplet trappedby laserwas used as adhesive for micro objects. Micro droplet was transported and was fixed for combining the micro spheres. Doing similar processes, several micro spheres were connected.(4) Laser driven microstructure objectsPolystyrene latex sphere coupled optical trap was driven by laser. Polystyrene latex sphere on the cantilever beam fabricated by laser lithography was vibrated photothermally.However, the cantilever beam of the single-mode optical fiber was not driven because of weakness of laser intensity.In the future, the optical system of which the three-dimensional trap is possible must be constructed for the fabrication of practical microstructure objects.