Development of Highly Pure and Atmosphelic Plasma with No-Electrode

无电极高纯常压等离子体的开发

• 批准号: 04558001
• 负责人: SHIMADA Ryuichi
• 金额: $ 7.74万
• 依托单位: TOKYO INSTITUTE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1992
• 资助国家: 日本
• 起止时间: 1992 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-04558001/
• 关键词: toroidal plasma; atmospheric plasma; plasma diagnostics; flow visualization; He ICP; He ICP-MS; mass spectrometry; 環境問題; トーラス形状; 高周波プラズマ; 気流安定化; アルゴン; ヘリウム; 熱平衡; 安定放電; 物質分解; 微量分析

A new toroidal gas insulated plasma (GIP) source was designed and (a) quartz, (b) metallic discharge tubes were constructed. Using the gas vortex flow as plasma support gas, it was able to sustain the stable toroidal Ar plasma on the center of discharge tube up to 760 Torr in each discharge tube.The new GIP source doesn't need preparatory ionization and doesn't have any electrode, so maintenance caused by consumption of electrode isn't needed. Therefore, extremely long time operation is possible. Because the vortex flow of plasma support gas induced that plasma can't touch the discharge tube, so high purity plasma is obtained.From these characteristics, we are thinking that this GIP source is useful for fields that have problems of impurities in the plasma, for example excitation medium of laser, diamond film preparation, etc.Furthermore it is consider that this plasma source can be applied to large emission area UV source for industrial use. To generate higher temperature plasma for d … More ecomposition of industrial wastes, for example PCB,enlargement of vessel and power up are needed using metallic discharge tube.Argon inductively coupled plasma mass spectrometry (Ar ICP-MS) is a multielement technique with excellent detection limits and the added ability to provide isotopic information.To overcome some problems of the Ar ICP,new torch for helium ICP is developed. By the flow visualization using spark tracing method, it is founded that with the conventional torch for Ar ICP,adequate helium gas vortex flow to sustain the stable plasma doesn't form in the plasma generate region. Spatial measurement of helium emission intensity is performed, and generation of doughnut plasma is confirmed. Therefore, we designed and developed new enhanced vortex flow torch for He ICP and stable helium plasma was generated by that torch.Furthermore, He ICP mass spectrometry (He ICP-MS) device that will have high sensitivity for high ionization energy elements was developed using that torch. Effects of sampler-skimmer distance on the pressure in the 2nd stage and on the ion signal intensities were studied and it was found that both the Mach disk position and the most suitable position for analysis are 7 mm. No background spectral peak was found at m/z values over 32 except for copper from the sampler.Ion intensities of neon and krypton that were low in sensitivity in argon ICP-MS due to their high ionization energies were as much as 36 and 24 times greater in He ICP-MS,respectively. Less

设计了一个新的环形气体绝缘血浆（GIP）源，并构建了（a）石英，（b）金属放电管。将气体涡流流作为血浆支持气体，它能够在每个放电管中保持稳定的环形AR血浆，最高760托尔。新的GIP源不需要准备电离，并且不具有任何电极，因此不需要电极消耗引起的维护。因此，可能会运行非常长的操作。因为血浆支持气体的涡旋流动引起的血浆无法接触放电管，因此可以获得高纯度等离子体。从这些特征中，我们认为，这种GIP源对在血浆中具有杂质问题的田地有用，例如激发型的兴奋媒介，钻石膜的兴奋媒介可以使用该型号来源。为了产生较高的温度血浆D…使用金属排放管，需要扩大船只和功率的工业废物，例如PCB，需要扩大船只和功率。Argon电阻耦合等离子质谱（AR ICP-MS）是具有出色的检测能力的多元素，可以提供一些问题。发达。通过使用火花跟踪方法的流动可视化，建立了用于AR ICP的常规火炬，足够的氦气涡流流以维持稳定的血浆在等离子体生成区域不会形成。进行氦发射强度的空间测量，并确认甜甜圈血浆的产生。因此，我们为ICP设计并开发了新的增强的涡流式摩擦，并通过该火炬产生了稳定的氦等离子体。Furthermore，He ICP质谱（He ICP-MS）设备将对高电离能量元素具有很高的灵敏度，该设备是使用该火炬开发的。抽样器平衡器距离对第二阶段和离子信号强度的压力的影响进行了研究，发现马赫磁盘位置和最合适的分析位置均为7 mm。除了来自Sampler的铜的铜和krypton的铜，由于其高电离能的高电离能在HE ICP-MS的高电离能量高达36和24倍以外，在32上没有发现背景光谱峰。较少的

项目成果

沖野晃俊、宮武健一郎、内田照雄、南茂夫: "ダブルボア放電管型MIP光源のプラズマ温度および電子密度の測定" 分光研究. 43. 23-30 (1994)

Akitoshi Okino、Kenichiro Miyatake、Teruo Uchida、Shigeo Minami：“双孔放电管型 MIP 光源中等离子体温度和电子密度的测量”光谱研究 43. 23-30 (1994)。

沖野晃俊、宮武健一郎、内田照雄、南茂夫: "ダブルボア放電管MIP光源のプラズマ温度および電子密度の測定" 分光研究. 43. 23-30 (1994)

Akitoshi Okino、Kenichiro Miyatake、Teruo Uchida、Shigeo Minami：“双孔放电管 MIP 光源中等离子体温度和电子密度的测量”光谱研究 43. 23-30 (1994)。

沖野晃俊、石塚博明、田丸浩二、平山一成、嶋田隆一: "発行分光分析のための旋回気流強化型ヘリウム誘導結合プラズマ" 第9回光源物性とその応用研究会資料. 1-8 (1994)

Kotoshi Okino、Hiroaki Ishizuka、Koji Tamaru、Kazunari Hirayama、Ryuichi Shimada：“用于发表光谱分析的旋转气流增强氦感应耦合等离子体”第 9 届光源物理及其应用研究组的材料 1-8 (1994)。

沖野晃俊、石塚博明、平山一成、野村雄二、嶋田隆一: "旋回気流強化型ヘリウム誘導結合プラズマの分光特性の測定" 分析化学. 43. 685-689 (1994)

Kotoshi Okino、Hiroaki Ishizuka、Kazunari Hirayama、Yuji Nomura、Ryuichi Shimada：“旋转气流增强氦感应耦合等离子体的光谱特性的测量”分析化学 43. 685-689 (1994)。

沖野晃俊、廣中史彦、野村雄二、嶋田隆一、他: "大気圧トーラス形状高純度プラズマの生成" プラズマ・核融合学会誌. 69. 1242-1249 (1993)

Akitoshi Okino、Fumihiko Hironaka、Yuji Nomura、Ryuichi Shimada 等：“大气压圆环形高纯度等离子体的生成”日本等离子体与核聚变学会杂志 69. 1242-1249 (1993)。