Production and surface improvement of functional materials by using DC arc, RF,magnetron plasma.

为了建立工业生产用高功能材料的合成条件，提高表面处理的可接性，利用本项目资助的大型实验等离子体CVD反应器和专用光谱仪进行了一些小实验。本项目的主要程序没有改变，但由于测量系统的调整延迟很小，将比原计划晚几个月完成。主要实验结果如下：(1)用专用光谱仪给出了直流弧光等离子体中活性自由基离子C、C_2、CH、CH_2、CH_3和CH的空间分布表达式。利用这一技术，通过光谱结果，建立了高功能材料的合成条件。(2)在几种耐火衬底上合成了多晶小块金刚石薄膜和块。利用上述CVD反应器，在YSZ燃料电池电极等功能陶瓷上进行粉末喷涂或涂层。(4)通过渗流理论揭示了氧化物超导体和优质复合材料等固体材料的高效作用机理。

An establishment in the synthesizing conditions of high functional materials for industrial production and an improvement in joinability of surface treatment were aimed by conducting some small experiments using a large scale experimental plasma CVD reactor with a special spectrometer financially supported by this project.The main program in this project were not changed, but will be finished in a few month later than initial plan due to the small delay in a adjustment of measurements system. Main obtained experimental results are as follows ;(1)An expression of the spatial distributions for the active radical ion species in DC arc plasma such as C,C_2, CH,CH_2, CH_3 and CH^<3+> was performed by special spectrometer. Using this techniques, an establishment in the synthesizing conditions of high functional materials was experienced through spectrometrical results.(2)Polycrystaline bur small diamond film and block was synthesized on several refractory substratum metala. Numbers in nucleating sites than growth rate were much influenced by the reaction between substratum surface and radical ions exited in DC arc plasma.(3)Using above mentioned CVD reactor, powder spray or coatings of high functional solids in high temperature plasma on functional ceramics such as YSZ electrode for fuel cell.(4)A high functional mechanism in solids such as oxide super conductor and high quality composite materials were cleares by percolation theory.