Production and surface improvement of functional materials by using DC arc, RF,magnetron plasma.

本课题在原有的主要研究课题基础上，利用大型等离子体化学气相沉积实验装置和专用光谱仪进行了一些小规模的实验研究，旨在建立工业化生产的高性能材料合成条件，提高表面处理的可操作性。但由于测量系统的调整略有延误，将比最初计划晚几个月完成。主要实验结果如下：（1）利用专用谱仪对直流电弧等离子体中的活性自由基离子种类C、C_2、CH、CH_2、CH_3和CH^<3+>的空间分布进行了解析。利用该技术，通过光谱测定结果，确立了高功能材料的合成条件。（2）在几种难熔基底金属上合成了多晶金刚石小块和金刚石膜。直流电弧等离子体中激发的自由基离子与基体表面的反应对成核点的数量的影响比生长速率大得多。（3）使用上述CVD反应器，在高温等离子体中在功能陶瓷如燃料电池用YSZ电极上粉末喷涂或涂覆高功能固体。(4)A逾渗理论阐明了氧化物超导体和高质量复合材料等固体中高功能化机理。

An establishment in the synthesizing conditions of high functional materials for industrial production and an improvement in joinability of surface treatment were aimed by conducting some small experiments using a large scale experimental plasma CVD reactor with a special spectrometer financially supported by this project.The main program in this project were not changed, but will be finished in a few month later than initial plan due to the small delay in a adjustment of measurements system. Main obtained experimental results are as follows ;(1)An expression of the spatial distributions for the active radical ion species in DC arc plasma such as C,C_2, CH,CH_2, CH_3 and CH^<3+> was performed by special spectrometer. Using this techniques, an establishment in the synthesizing conditions of high functional materials was experienced through spectrometrical results.(2)Polycrystaline bur small diamond film and block was synthesized on several refractory substratum metala. Numbers in nucleating sites than growth rate were much influenced by the reaction between substratum surface and radical ions exited in DC arc plasma.(3)Using above mentioned CVD reactor, powder spray or coatings of high functional solids in high temperature plasma on functional ceramics such as YSZ electrode for fuel cell.(4)A high functional mechanism in solids such as oxide super conductor and high quality composite materials were cleares by percolation theory.