An Attempt to In-situ Visualization for the Distribution of Reacting Radical Ion Species in DC Are Plasma

通过等离子体离子反应，在其他功能固体(导电电极、磁性材料)上合成了微米级多晶金刚石，并形成了氮化物、碳化物和氧化物等HGH功能膜。利用本研究所的几台表面分析仪器对合成或形成的物质进行了鉴定，通过计算机控制的光谱仪显示自由基离子物种的空间分布，明确了活性自由基离子物种在DC Ar等离子体中的作用。用高速步进扫描方式的精密光谱仪测量了特殊离子特殊离子物种的检测。本项目的第一个目的是通过将特殊离子的光谱强度数字转换到监视器电视上的亮度和颜色变化的光谱强度来实现对自由基离子物种空间分布的实时可视化。这些图形结果的所有数字数据都记录在计算机的磁盘上。此外，本项目的第一个目的是通过将特定离子的光谱强度数字转换为监视器电视上的亮度和颜色变化的光谱强度来实现对自由基离子物种空间分布的实时可视化在平衡和非平衡热力学假设下，尝试通过计算机计算对所获得的光谱分布进行理论分析。本项目的第二个或最终目的是通过比较和考虑实验结果和理论结果来确定制备高功能材料的最佳等离子体条件。

By means of plasma ion reactions, synthesis of micro-poly-crystalline diamond and formation of hgh functional films such as nitride, carbide and oxide on other functional solids (conducting electrode, magnetic materials) were performed. Identification for synthesized or formed substances was conducted by several machines for surface analysis belonged to our institution.The role of active radical ion species in DC are plasma were cleared through showing the spatial distributions of radical ion species by computer controlled spectrometer. The detection of special ion special ion species was measured by a precision spectrometer with high speed step scanning mode.The first purpose of this project, in-situ visualization of the spatial distributions of radical ion species, could be possible by digital transferring the spectrometrical intensities of special ion to those in brightness and color change on monitor TV.And all digital data of these graphical results ere recorded on the disk for computer.Also, theoretical analysis for obtained spectrum distributions was attempt by computer calculation under the equilibrium and non-equilibrium thermodynamic assumption.The second or final purpose of this project will be finished to establish the optimum plasma conditions to from high functional materials by comparing and considering the experimental and theoretical results.