An Attempt to In-situ Visualization for the Distribution of Reacting Radical Ion Species in DC Are Plasma

直流等离子体中反应自由基离子种类分布的原位可视化尝试

• 批准号: 05453089
• 负责人: TOMII Yoichi
• 金额: $ 4.48万
• 依托单位: KYOTO UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 1994
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-05453089/
• 关键词: active radical ion; spectrometer; diamond; in-situ visualization; spatial distribution; モノクロメーター; inn-situ可視化; プラズマ; プラズマ反応; プラズマ発光; in-situ; 画像解析; 活性ラディカルイオン種; プラズマ分光; VTR

By means of plasma ion reactions, synthesis of micro-poly-crystalline diamond and formation of hgh functional films such as nitride, carbide and oxide on other functional solids (conducting electrode, magnetic materials) were performed. Identification for synthesized or formed substances was conducted by several machines for surface analysis belonged to our institution.The role of active radical ion species in DC are plasma were cleared through showing the spatial distributions of radical ion species by computer controlled spectrometer. The detection of special ion special ion species was measured by a precision spectrometer with high speed step scanning mode.The first purpose of this project, in-situ visualization of the spatial distributions of radical ion species, could be possible by digital transferring the spectrometrical intensities of special ion to those in brightness and color change on monitor TV.And all digital data of these graphical results ere recorded on the disk for computer.Also, theoretical analysis for obtained spectrum distributions was attempt by computer calculation under the equilibrium and non-equilibrium thermodynamic assumption.The second or final purpose of this project will be finished to establish the optimum plasma conditions to from high functional materials by comparing and considering the experimental and theoretical results.

通过等离子体离子反应，合成了微多晶金刚石，并在其他功能固体（导电电极、磁性材料）上形成了氮化物、碳化物、氧化物等高功能薄膜。合成或形成的物质的鉴定是由几台属于我们机构的表面分析机器进行的。通过计算机控制谱仪显示自由基的空间分布，明确了活性自由基在直流等离子体中的作用。采用高速步进扫描的精密光谱仪对特殊离子进行了检测。该项目的第一个目的是通过将特定离子的光谱强度数字化转换为显示器电视上的亮度和颜色变化，从而实现对自由基种类空间分布的实时可视化。这些图形结果的所有数字数据都被记录在磁盘上供计算机使用。在热力学平衡和非平衡假设下，通过计算机计算，对得到的光谱分布进行了理论分析。本项目的第二个或最终目的是通过比较和考虑实验和理论结果，建立制备高功能材料的最佳等离子体条件。

项目成果

Y.Tomii: "The Effect of Phase Change of Li-Al Alloy Electrode on Thermoelectric Power in LiCl-KCl Eutectic System" DENKI KAGAKU. 61. 736-737 (1993)

Y.Tomii：“Li-Al合金电极的相变对LiCl-KCl共晶体系中热电势的影响”电气化学。

冨井洋一: "プラズマジェットCVDダイヤモンンド膜形成におよぼす非ダイヤモンド質の影響" 粉体および粉末冶金. 40. 80-85 (1993)

Yoichi Tomii：“非金刚石材料对等离子喷射 CVD 金刚石薄膜形成的影响”粉末和粉末冶金学。 40. 80-85 (1993)

Y.Kusano: "Phase and their Relations in the BiO_<1.5>-SrO (SrCO_3) -CuO System at 720C" J.J.Soc.Pow.& Pow.Met.vol.40. 1049-1052 (1993)

Y.Kusano：“720C 下 BiO_<1.5>-SrO (SrCO_3) -CuO 体系中的相及其关系”J.J.Soc.Pow。

J.Takada, Y.Tomii, N.Yoshida, M.Sasaki and M.Koiwa: "Internaloxidation of Dilute Silver Alloys" Oxidation of Metals. 37. 13-22 (1992)

J.Takada、Y.Tomii、N.Yoshida、M.Sasaki 和 M.Koiwa：“稀银合金的内部氧化”金属的氧化。

T.Niinae: "Mechanical Grinding and Reforming Process of the Bi-2201 Phase" J.J.Soc.Pow.& Pow.Met.vol.40. 1065-1068 (1993)

T.Niinae：“Bi-2201 相的机械研磨和重整过程”J.J.Soc.Pow。