位相共役光を用いた超精密3次元曲面の自動形状計測に関する研究

相位共轭光超精密三维曲面自动形状测量研究

• 批准号: 05750119
• 负责人: 高谷 裕浩
• 金额: $ 0.58万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Encouragement of Young Scientists (A)
• 财政年份: 1993
• 资助国家: 日本
• 起止时间: 1993 至 无数据
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-05750119/
• 关键词: レーザ応用計測; 形状計測; 超精密3次元曲面; 位相共役光; 光屈折性素子; 縮退4光波混合

高精度金型加工の高能率化を図るためには,超精密3次元曲面形状評価をインプロセスで行うことのできる,高速で高精度なレーザー応用自動計測技術の開発が必要である。そこで本研究では,位相共役光の特性と高精度なマイケルソン干渉計を応用した超精密3次限曲面の測定評価法の開発を目的とするものである.本年度はまだ十分明らかになっていない位相共役光発生の基本特性を調べるため,以下のような実験を遂行した.(1)位相共役光発生の基本特性を調べることを目的として光屈折性結晶の1つであるBSO(Bi_<12>SiO_<20>)とアルゴンレーザーを光学系を設計・制作した。また、前進ポンプ光および後進ポンプ光をBDSO結晶に対向させて入射し,さらにプローブ光を入射して,プローグ光の光路を逆向きに進行する位相共役光を発生させる縮退4光波混合実験を行い、位相共役光の発生を確認した。(2)前進ポンプ光,後進ポンプ光,プローブ光の各強度が位相共役光強度に及ぼす影響を調べるため,前進ポンプの光路上にNDフィルタを挿入することによってBSO結晶に入射する前進ポンプ光の強度を変化させたときの位相共役光強度を測定した.(3)レーザー出力強度および波長が位相共役光の発生特性に及ぼす影響を調べるため,レーザー出力を20mWから20mWずつ1500mWまで変化させ,さらにレーザー光波長を457.9〜514.5nmまでの間で8段階変換させた場合の位相共役光強度を測定した.(4)ブローグ光のBSO結晶への入射角度が位相共役光の発生特性に及ぼす影響を調べるため,プローブ光の入射角度を10〜50度まで変換させたときの位相共役光強度を測定した.これらの実験の結果,位相共役光の発生特性として以下のことが明らかになった.・位相共役光はレーザー出力40mW,波長524.5nmの時最も効率よく発生し,波長が短くなるとともに効率が低下する.・位相共役光強度はプローブ光の入射角度が大きくなるに伴い大きくなるが,入射角度16ﾟで最大値をとった後は入射角度の増大とともに減少し,入射角度50ﾟではほとんど検出されなくなる.

High-precision metal machining, high-energy machining, ultra-precision three-dimensional curved surface shape, high-speed, high-precision, high-precision, high-precision In this study, phase co-operation optical properties, high-precision optical measurement and measurement of ultra-precision cubic limited surfaces are used in this study. in this study, the phase common optical properties, high-precision optical properties, high-precision This year, we are very clear about the basic characteristics of phase co-operation. (1) Phase co-operation. The basic characteristics of light production are very clear this year. (1) the basic characteristics of phase co-operation are very clear this year. (1) Phase co-operation, the basic properties of light, the basic characteristics of photorefractive properties, the basic characteristics of photorefractive BSO (Bi_<12>SiO_<20&gt). ) the design and production of the Department of Optics. In the rear, the BDSO crystal is used to detect the incident light, the optical beam is incident, the optical path is in the opposite direction, and the phase co-operation is performed in the reverse direction of the phase co-operation, the phase co-operation is used to realize the operation of the hybrid light wave. (2) the light in the front and the light in the back, the light intensity and the intensity of the light in each phase. On the optical path, the ND signal is used to enter the optical fiber. The BSO results show that the incident light intensity is enhanced, the phase intensity is enhanced, and the phase intensity is measured. (3) the output force, the wave length, the phase properties and the optical properties of the phase are measured. (3) the optical properties and the optical properties of the phase co-operation of the wave length are measured by the phase co-operation of the laser. (3) the optical properties and the optical properties of the phase co-operation of the wave length are measured, and the optical properties and the optical properties of the phase are measured by 20mW, 20mW, and 1500mW. The optical wave length is 457.9 ~ 514.5nm. The optical intensity measurement is based on the phase co-operation. (4) the phase co-operation light intensity measurement is based on the optical BSO crystal, the incident angle, the optical properties, the incident angle and the incident angle. According to the results of the experiment, the phase common light generation properties are affected by the following information. The phase co-operation optical fiber output 40mW, the wave length 524.5nm peak frequency is very high, and the wave length short-range temperature response rate is very low. The phase co-operation light intensity, the incident angle, the incident angle, the incident