Preparation of Plasma Polymerized Films in D.C.Glow

D.C.Glow 中等离子体聚合薄膜的制备

• 批准号: 06555284
• 负责人: KAKIMOTO Masa-aki
• 金额: $ 2.43万
• 依托单位: TOKYO INSTITUTE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555284/
• 关键词: D.C.Glow; Plasma Polymerization; Naphthalene; Benzene; Organic Slicon; Silicon Oxide; Carbon disulfide; Sulfer; ナフタリン; 二酸化炭素; パ-フルオロナフタレン; ESCA

The purpose of the project is to investigate plasma polymerization under D.C.glow conditions, which has not been studied so far.1) The monomers are not required special functional groups for polymerization such as vinyl group. Naphthalene and fluorinated naphthalenes were selected as the monomers, which were sublimable monomers, to investigate plasma polymerization conditions such as voltage and gas pressure. It was found that the chemical structure of the monomers was completely destroyed, and oxidized structure was found at the surface of the films.2) Benzene and its fluorinated derivatives were conducted to the plasma polymerization. Structure of the carbon obtained in this case was different from the carbon prepared from naphthalene. The surface energy decreased with increasing the number of the fluorine atoms in the monomers.3) Siloxane derivatives were plasma polymerized to produce transparent carbon-silica films. Wetability of the films was low, and the polymer films showed excellent gas separation ability.4) Organic and halogenated titanium and tin were used as the monomers. The films obtained consisted of the metal oxide.5) Imidazole and vinylimidazole were selected as the monomers. Vinylimidazole afforded fluorescent behavior, but imidazole did not.6) Two different kind of gases were successfully conducted to make inclined materials,

该项目的目的是研究直流辉光条件下的等离子体聚合，迄今为止尚未进行过研究。1）单体不需要乙烯基等特殊官能团即可聚合。选择萘和氟化萘作为可升华单体，研究了等离子体聚合条件，如电压和气体压力。结果表明，单体的化学结构被完全破坏，薄膜表面出现氧化结构。2）将苯及其含氟衍生物引入等离子体聚合。在这种情况下获得的碳的结构不同于由萘制备的碳。表面能随单体中氟原子数的增加而降低。3）硅氧烷衍生物等离子体聚合制备透明碳-二氧化硅薄膜。薄膜的润湿性较低，具有良好的气体分离性能。4）以有机钛和卤化锡为单体，制备了具有良好气体分离性能的钛锡聚合物薄膜。5）以咪唑和乙烯基咪唑为单体，制备了一种新型的金属氧化物薄膜。乙烯基咪唑具有荧光行为，而咪唑没有。6）成功地引导两种不同的气体来制备倾斜材料，

项目成果

T.Suwa,M.Kakimoto,Y.Imai: "ACS Symposium Series" American Chemical Society, 13 (1995)

T.Suwa、M.Kakimoto、Y.Imai：“ACS 研讨会系列”美国化学会，13 (1995)

T.Suwa,M.Jikei,M.Kakimoto Y.Imai: "Preparation and Evolustion of Direct Current Glow Discharge Plasma Polymerized Films of Naphthalene and Octafhoromaphthalene" Jpn.J.Appl.Phys.34. 6503-6508 (1995)

T.Suwa，M.Jikei，M.Kakimoto Y.Imai：“萘和八氟马酞的直流辉光放电等离子体聚合膜的制备和演化”Jpn.J.Appl.Phys.34。

T.Suwa, M.Jikei, M.Kakimoto, Y.Imai: "Preparation and Evaluation of Direct Current Glow Discharge Plasma-polymerized Films of Naphthalene and Octafluoronaphthalene" Jpn.J.Appl.Phys.34. 6503-6508 (1995)

T.Suwa、M.Jikei、M.Kakimoto、Y.Imai：“萘和八氟萘的直流辉光放电等离子体聚合膜的制备和评价”Jpn.J.Appl.Phys.34。

T.Suwa,M.Jikei,M.Kakimoto,Y.Imai: "Preparation and evaluation of direct current glow discharge plasma‐polymerized silns of naphyhalene and octasluoronaphthalenc" Jpn. J. Appl. Phys. 34. 6503-6508 (1995)

T.Suwa、M.Jikei、M.Kakimoto、Y.Imai：“萘和八氟萘的直流辉光放电等离子体聚合硅的制备和评价”J. Appl. 34. 6503-6508 (1995)

Toshihiro Suwa, Mitsutoshi Jikei, Masa-aki Kakimoto, Yoshio Imai: "Plasma polymerization in direct current glow : characterization of plasma-polymerized films of benzene and fluorinated derivatives." ACS Symposium Series 614, Chapter. 31. 471-484 (1995)

Toshihiro Suwa、Mitsutoshi Jikei、Masa-aki Kakimoto、Yoshio Imai：“直流发光中的等离子体聚合：苯和氟化衍生物的等离子体聚合薄膜的表征。”