Preparation of Plasma Polymerized Films in D.C.Glow

D.C.Glow 中等离子体聚合薄膜的制备

• 批准号: 06555284
• 负责人: KAKIMOTO Masa-aki
• 金额: $ 2.43万
• 依托单位: TOKYO INSTITUTE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1994
• 资助国家: 日本
• 起止时间: 1994 至 1995
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555284/
• 关键词: D.C.Glow; Plasma Polymerization; Naphthalene; Benzene; Organic Slicon; Silicon Oxide; Carbon disulfide; Sulfer; ナフタリン; 二酸化炭素; パ-フルオロナフタレン; ESCA

The purpose of the project is to investigate plasma polymerization under D.C.glow conditions, which has not been studied so far.1) The monomers are not required special functional groups for polymerization such as vinyl group. Naphthalene and fluorinated naphthalenes were selected as the monomers, which were sublimable monomers, to investigate plasma polymerization conditions such as voltage and gas pressure. It was found that the chemical structure of the monomers was completely destroyed, and oxidized structure was found at the surface of the films.2) Benzene and its fluorinated derivatives were conducted to the plasma polymerization. Structure of the carbon obtained in this case was different from the carbon prepared from naphthalene. The surface energy decreased with increasing the number of the fluorine atoms in the monomers.3) Siloxane derivatives were plasma polymerized to produce transparent carbon-silica films. Wetability of the films was low, and the polymer films showed excellent gas separation ability.4) Organic and halogenated titanium and tin were used as the monomers. The films obtained consisted of the metal oxide.5) Imidazole and vinylimidazole were selected as the monomers. Vinylimidazole afforded fluorescent behavior, but imidazole did not.6) Two different kind of gases were successfully conducted to make inclined materials,

该项目的目的是研究尚未研究到迄今尚未研究的血浆聚合。1）单体不需要特殊的官能团进行聚合，例如乙烯基类。选择萘和氟萘烯作为单体，它们是可升华的单体，以研究等离子体聚合条件，例如电压和气压。发现单体的化学结构被完全破坏，并在膜表面发现了氧化结构。2）苯及其氟化衍生物进行到血浆聚合。在这种情况下，获得的碳的结构与萘制备的碳不同。随着单体中氟原子数量的增加，表面能量降低。3）硅氧烷衍生物被血浆聚合以产生透明的碳 - 硅膜膜。膜的湿润性很低，聚合物膜表现出极好的气体分离能力。4）使用有机和卤代钛和锡作为单体。获得的膜由金属氧化物组成。5）咪唑和乙烯咪唑被选为单体。乙烯基咪唑提供了荧光行为，但咪唑没有。6）成功进行了两种不同类型的气体，以制造倾斜的材料，

项目成果

T.Suwa,M.Kakimoto,Y.Imai: "ACS Symposium Series" American Chemical Society, 13 (1995)

T.Suwa、M.Kakimoto、Y.Imai：“ACS 研讨会系列”美国化学会，13 (1995)

T.Suwa,M.Jikei,M.Kakimoto Y.Imai: "Preparation and Evolustion of Direct Current Glow Discharge Plasma Polymerized Films of Naphthalene and Octafhoromaphthalene" Jpn.J.Appl.Phys.34. 6503-6508 (1995)

T.Suwa，M.Jikei，M.Kakimoto Y.Imai：“萘和八氟马酞的直流辉光放电等离子体聚合膜的制备和演化”Jpn.J.Appl.Phys.34。

T.Suwa, M.Jikei, M.Kakimoto, Y.Imai: "Preparation and Evaluation of Direct Current Glow Discharge Plasma-polymerized Films of Naphthalene and Octafluoronaphthalene" Jpn.J.Appl.Phys.34. 6503-6508 (1995)

T.Suwa、M.Jikei、M.Kakimoto、Y.Imai：“萘和八氟萘的直流辉光放电等离子体聚合膜的制备和评价”Jpn.J.Appl.Phys.34。

T.Suwa,M.Jikei,M.Kakimoto,Y.Imai: "Preparation and evaluation of direct current glow discharge plasma‐polymerized silns of naphyhalene and octasluoronaphthalenc" Jpn. J. Appl. Phys. 34. 6503-6508 (1995)

T.Suwa、M.Jikei、M.Kakimoto、Y.Imai：“萘和八氟萘的直流辉光放电等离子体聚合硅的制备和评价”J. Appl. 34. 6503-6508 (1995)

T.Suwa,M.Jikei,M.kakimoto,Y.Imai: "Plasma polymenzation in direct current glow : Characterization of plasma‐dymerizid froms of benzene and fluprinated derivatives" ACS Symposium series. 614. 471-484 (1995)

T.Suwa、M.Jikei、M.kakimoto、Y.Imai：“直流辉光中的等离子体聚合：苯和氟代衍生物的等离子体二聚化物的表征” ACS 研讨会系列。 614. 471-484 (1995)