Preparation of Plasma Polymerized Films in D.C.Glow

该项目的目的是研究直流辉光条件下的等离子体聚合，这是迄今为止尚未研究过的。1)单体不需要乙烯基等特殊官能团进行聚合。以萘和氟化萘为可升华单体，研究了等离子体聚合的电压、气压等条件。发现单体的化学结构被完全破坏，膜表面出现氧化结构。2)将苯及其氟化衍生物进行等离子体聚合。在这种情况下得到的碳的结构不同于从萘制备的碳。表面能随单体中氟原子数目的增加而减小。3)等离子体聚合硅氧烷衍生物制备透明碳-硅薄膜。膜的润湿性较低，聚合物膜具有良好的气体分离能力。4)以有机和卤化钛和锡为单体。所得到的薄膜由金属氧化物组成。5)选择咪唑和乙烯基咪唑作为单体。Vinylimidazole有荧光行为，而咪唑没有。两种不同的气体被成功地用于制造倾斜材料。

The purpose of the project is to investigate plasma polymerization under D.C.glow conditions, which has not been studied so far.1) The monomers are not required special functional groups for polymerization such as vinyl group. Naphthalene and fluorinated naphthalenes were selected as the monomers, which were sublimable monomers, to investigate plasma polymerization conditions such as voltage and gas pressure. It was found that the chemical structure of the monomers was completely destroyed, and oxidized structure was found at the surface of the films.2) Benzene and its fluorinated derivatives were conducted to the plasma polymerization. Structure of the carbon obtained in this case was different from the carbon prepared from naphthalene. The surface energy decreased with increasing the number of the fluorine atoms in the monomers.3) Siloxane derivatives were plasma polymerized to produce transparent carbon-silica films. Wetability of the films was low, and the polymer films showed excellent gas separation ability.4) Organic and halogenated titanium and tin were used as the monomers. The films obtained consisted of the metal oxide.5) Imidazole and vinylimidazole were selected as the monomers. Vinylimidazole afforded fluorescent behavior, but imidazole did not.6) Two different kind of gases were successfully conducted to make inclined materials,