Characterization at atomic level and nanoprocessing of material using high-voltage electron microscopy

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Fundamental structure and microstructure of a variety of ceramics was characterized on atomic resolution. A new method for characterization of materials by the element mapping was established. Precise analysis of EELS spectra led to determination of electronic structure and elemental analysis from nanometer regions. Local concentration of oxygen in YBCO was determined by the critical voltage effect.Nucleation and growth of the ordered phase in the order-disorder transition was observed by high resolution electron microscopy. Behavior of defects such as dislocations and point defects and also melting process of crystals were observed dynamically. Nano-processing of diamond thin foils was attempted to improve its performance. Radiation damage of materials was also observed.Growth process at the crystal surface and sputtering by electron beam were observed. Diordering and amorphitization of intermetallic compound by electron irradiation was studied and a method of nanocharacterization using an electron beam was established. Electron tomography was applied to identifying structural defects in LSI and its nanoprocessing.