Study on Vision System for High Accurate Positioning and Process Control in Micro-Joining

本文主要研究了微连接中的高精度视觉定位和过程控制。本研究的主要结果如下：1）高精度的视觉感知是通过视场分离的成像方法实现的本研究提出的视场分离的方法，可以通过一个带有棱镜的电视摄像机对不同的两个区域进行成像，从而实现高精度的视觉感知。利用灰度方差进行微结构的模式匹配，注意用局部区域的灰度方差值来表征微结构的灰度分布，阐明了利用该方差值进行模式匹配对于表面粗糙度或观察条件引起的亮度变化是最有效的。3）区分阈值法自动检测微接缝提出了一种基于统计方法和发生概率分布的微接缝图像阈值选取新方法，并阐明了在亮度变化引起的微关节场的自动提取中，采用该方法也能得到同样的结果是最有效的单点TAB加载曲线控制的低温小变形键合。单点TAB技术中的热超声键合工艺由金凸点和TAB引线之间界面处的塑性流动控制。在初始接触过程中，存在一个最小的加载力以实现接触，而在后一个粘附过程中，加载力越小，超声能量对界面的贡献越大。

In tis study, the vision system for high accurate positioning and process control in the micro joining are discussed. The followings are results.1) High accurate visual sensing by imaging method with separated fields of vision.An separative wiewing method that is proposed in this research enables to take a image for the different two regions by a TV camera with a prism and makes possible a high accurate visual sensing.2) Pattern matching of micro joints using variance of gray level.We paid attention to the variance value which presents the distribution of gray level in a local region and clarified that the pattern matching by this variance value is the most effective for the change of the brightness caused by the surface roughness or the viewing condition.3) Automatic detection of micro joints by distinguished thresholding method.We proposed a new threshold selection method of the micro-joints images based on the statistical method and occurred probability distribution, and clarified that it is most effective that the automated extraction of micro-joint fields can be obtained the same result by this method when the change of the brightness caused.4) Low temperature and small deformation bonding by control of loading profile in single point TAB.The thermosonic bonding process used in the single point TAB technology is dominated by the plastic flow at the interface between a gold bump and TAB lead. In the initial contact process, the minimum loading force exists to obtain the contact, and the other hands, in the latter adhesion process, the contribution of the ultrasonic energy into the interface becomes larger under the lower loading force.