Evaluation method of tribological properties of ceramic coating film

为了开发更实用的陶瓷涂层摩擦学性能评价方法，我们研制了在环境扫描电子显微镜（Environmental Scanning Electron Microscope，ESEM）小室中安装销盘式摩擦磨损试验机的ESEM Tribo-SYSTEM和具有两个金刚石针尖的AFM Tribotester，分别对陶瓷涂层的摩擦学性能进行了评价。1.对离子束辅助沉积法制备的氮化碳薄膜进行了传统的宏观销-盘摩擦磨损试验。在宏观摩擦磨损试验机上，在低载荷下，氮化碳涂层比碳涂层具有更好的磨损性能。3.在ESEM摩擦系统下，氮化碳涂层与金刚石针在水蒸气中的摩擦系数小于0.1。4.在SEM摩擦系统下，当AFM大半径金刚石针在低接触压力下时，氮化碳涂层的耐磨性优于碳涂层。另一方面，当AFM的尖锐金刚石针的接触压力较大时，碳涂层膜显示出比氮化碳更好的耐磨性。

In order to develop more useful evaluation method of tribological properties of ceramic coating film than previous ones, ESEM Tribo-SYSTEM where pin-on-disk type tribotester was installed in the chamber of Environmental Scanning Electron Microscope, and AFM Tribotester which has two diamond tips for scratching and observation of surface were developed.Obtained results are summarized as follows :1.Traditional macroscopic pin-on-disk tribotest was done for the carbon nitride coating films which were produced by ion beam assisted deposition method. Harder carbon nitride coating films showed small specific wear amount.2.Under macroscopic tribotester, carbon nitride showed better wear properties that carbon in low load. On the other hand, at the high load, carbon showed better wear resistance than carbon nitride.3.Under ESEM TRIBO-SYSTEM,friction coefficient of carbon nitride coating film against diamond pin in water vapor was less than 0.1.4.Under SEM TRIBO-SYSTEM,when low contact pressure by large radius of diamond pin of AFM,carbon nitride showed better wear resistance than that of carbon. On the other hand, when contact pressure was large by sharp diamond pin of AFM,carbon coating film showed better wear resistance than that of carbon nitride.