Development of Skillful Manipulation Robot in Ultra-micro World

点击翻译按钮获取中文摘要

The aim of this research is to realize an ultra-micro skillful manipulation robot system, which executes ultra-micro manipulation skillfully under micro physical environment. In 1995-1996, we completed the construction of the ultra-micro manipulation system, clarified the dynamics of micro objects, established skillful manipulation methods to accomplish micro tasks, and proved the effectiveness of the constructed system through actual experimental tasks. The details are explained in the following.(1) Construction of the ultra-micro manipulation system : We completed the basic mechanical hardware, the controlling software, and the human interface mechanisms. As a result, analysis of human operation and trials of newly developed operation algorithm became possible.(2) Elucidation of the dynamics of micro objests : Through systematic experiments by constructed micro force measurement system, the adhesive force acting on micro objects turned out to be the electrostatic force and to be affe … More cted not only by charging potential but by surface roughness. Besides, the charging potential of micro objects under scanning electron microscope measured typically 10 to 100V.From these results, we succeeded in estimating the adhesive force acting on micro objects to be 100 to 1000 nN.Moreover, this force turned out to controllable by modifying the facing area of the tool and the object.(3) Development of skillful operation algorithm : To place a micro object at the desired position, we developed two operation methods : the contact area reduction method and the contact area replacement method. The dynamics for the both methods were analyzed and their effectiveness was proved theoretically. The robot trajectories for thses operations were mathematically derived.(4) Evaluation of the constructed system through experiments : We tried the placing tasks of micro solder spherical particles of 20mum in diameter by the above algorithm, and the effectiveness of the constructed system was proved. Less