International Joint Research on Micromanipulation under Electron Microscope

在信息系统的开发、制造和基础研究等领域，对扫描电镜下的微小物体的精密操作技术有着迫切的需求。为了建立该技术，需要在微力传感和基于SEM图像的测量的基础上提高操作的重复性和精度。在计划该项目时，东京大学开发了高分辨率力传感技术。瑞士联邦理工学院（ETH）开发了基于图像处理的精密位移测量技术，因此本项目的目标是东京大学和ETH通过知识和技术的交流与共享，建立在扫描电镜下的微小物体的自动精密操作技术。研制了一种高分辨率的力传感器，用于扫描电镜下微操作过程中的“原位”测量。 ...更多信息 通过微位移测量技术和力传感器模块的结合实现了CE传感器。力的分辨率为46 nN，测量范围为207 uN，传感器块的刚度为23 N/m。由于开发的传感器同时具有高刚度和高分辨率，因此可以在微操作过程中“原位”测量作用在传感器块上的工具上的微力。实现了一种微操作系统，通过整合SEM图像，基于测量和力控制技术。除了操作系统本身的性能外，高精度、高重复性地控制物体的运动是实现精密微操作的关键。因此，在本项目中，基于微观物理的适当的操纵方法是从理论上考虑和系统的实验。此外，还介绍了基于力和SEM图像的集成控制实现多个微球的自动对准，以及利用微球阵列制作光子晶体。少

Precise manipulation technique of a micro object under SEM is much required in the field of the development and manufacture of information systems or the basic research. The repeatability and precision of the manipulation should be improved based on the microforce sensing and the SEM image-based measurement to establish the technique.When this project was planned, the University of Tokyo had developed the high-resolution force-sensing technique. Swiss Federal Institute of Technology (ETH) had developed the precise displacement measurement technique based on the image processing.Therefore the goal of this project was that the University of Tokyo and ETH would establish the automatic precise-manipulation technique of a micro object under SEM by exchanging and sharing the knowledge and technique with each other.Anquetil, who was invited from ETH to the University of Tokyo, has developed a highresolution force sensor for "in situ" measurement during the micro manipulation under SEM.The for … More ce sensor is realized by the combination of the micro displacement measurement technique and the force sensor block. The force resolution is 46nN.The range of the measurement is 2O7uN.The rigidity of the sensor block is 23N/m. Since developed sensor has both high rigidity and high resolution at the same time, it enables "in situ" measurement of the micro force acting on a tool attached to the sensor block during the micro manipulation.Saito, who was sent from the University of Tokyo to ETH, has realized a micro manipulation system which can operate a micro object with high repeatability and precision through the integration of the SEM image-based measurement and the force control technique. Besides the good performance of manipulation system, it is important for the precise micro manipulation to control the object behavior with high precision and repeatability. Thus in this project the appropriate manipulation method based on the micro physics was derived from the theoretical consideration and the systematic experiments. Additionally the automatic alignment of several micro spheres through the integrated control based on the force and the SEM image and the manufacture of photonic crystal by the array of micro spheres are demonstrated. Less