Development of Intelligent Robot for Ultra-Micro Manipulation based on Nano-Visual-Servoing

为了修复LSI电路图案、组装微机械、处理细胞和操纵基因，需要纳米操纵技术。本研究的目的是开发“纳米视觉伺服操作系统”，并验证其有效性，我们构建了用于纳米操作的纳米视觉伺服系统，该系统由扫描电子显微镜（SEM）、安装在SEM样品室中的纳米操作器、实时图像处理器和集成它们的工作站组成。我们还提出了一种技术来表达的机器人本身的行为，命名为“行为得分”，智能鲁棒的任务执行的基础上的视觉信息。利用这些系统和技术，我们成功地雕刻了宽度为1-3 μ m的细线，并在纳米范围内具有优异的精度。这项任务意味着LSI电路的修复的可能性。这一结果直接证明了纳米视觉伺服系统的有效性执行纳米操作的基础上从SEM的视觉信息。通过这项研究，原来，传统的视觉伺服控制的机械手的轨迹，基于视觉检测的位置，是不够的自主纳米操作。视觉伺服控制的机械手的行为，基于感知的意义的行动，是必不可少的。建立基于行为评分的任务执行函数，并实现更复杂的任务，如结构的装配，是未来的工作。

In order to repair the LSI circuit pattern, assemble micromachines, handle cells, and manipulate genes, nano manipulation technology is required. The aim of this research is to develop "Nano Visual-Servoing Manipulation System", and to prove its effectiveness.We constructed the Nano Visual-Servoing System for nano manipulation, which consists of a scanning electron microscope (SEM), a nano manipulator installed to the specimen chamber of the SEM,a realtime image processor, and a workstation integrating them. We also proposed a technique to express the behavior of the robot itself, named "the Behavior Score", for intelligent robust task execution based on the visual information. Utilizing these system and technique, we succeeded in engraving lines as thin as 1-3 mu m in width with the excellent accuracy in the nanometer range. This task implies the possibility of the repair of the LSI circuit. This result directly proves the effectiveness of the Nano Visual Servoing System executing nano manipulation based on the visual information from the SEM.Through this research, it turned out that conventional visual-servoing control of the manipulator's trajectory, based on the visual detection of the position, is insufficient for autonomous nano manipulation. The visual-servoing control of the manipulator's behavior, based on the perception of the signification of the action, is essentially requisite. Establishment of the task executing function based on the Behavior Score, and the realization of the more complicated task, such as assembly of a structure, is the future work.