Study on Micromanipulator

仅仅减小通常尺寸的机械手的尺寸不足以获得完整的性能来处理微米尺寸的机械零件。这意味着合适的结构和控制方法对于微机械臂是必要的。本文研究了适合于微型零件装配的结构和驱动方法。并应用这些原理，成功地研制出了一种可处理imm尺寸零件的微机械臂样机。由于在小尺度操作中磁力在许多方面优于静电力，因此通过在线圈中电流产生的磁场中操纵永磁体来实现操作。微线圈阵列可以通过半导体工艺在硅片上制造。通过控制磁场的模式，可以同时操纵若干个永磁体。这些磁铁通过控制磁场把物体推到想要的位置。这是处理对象的基本原则。去年，另一种微操纵系统被开发出来。这个新系统使用了洛伦兹力，通过控制外部磁场可以组装三维结构。

Only reducing the size of a usual-size manipulator is not enough to get complete performaces to handle micrometer-sized mechanical parts. That means that appropriate structures and control methods are neccesary for a micromanipulator. In this research, the structure and the actuation method which are suitable for assembling of micro-sized parts are studied. And applying these principles, a prototype of a micromanipulator to hancle imm-sized parts has been developed successfully. As magnetic force is better than electrostatic force in many aspects for small scale manipulation, the manipulation is realized by handling a permanent magnet in the magnetic fieldwhich is generated by electric current in a coil. A micro coil array can be fabricated on a siliconwafer by a semiconductor process. Several numbers of permanent magnets can be manipulated simultaneously by controling the pattern of the magnetic field. These magnets push the object to the desired position by controlling the magnetic field. This is the fundamental principle of handling objects.Inthe last year, anothermicromanipulating system has been developed. Lorentz force is used for this new system and 3D structures can be assembled by controlling the magnetic fields outside.