Study on Micromanipulator

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Only reducing the size of a usual-size manipulator is not enough to get complete performaces to handle micrometer-sized mechanical parts. That means that appropriate structures and control methods are neccesary for a micromanipulator. In this research, the structure and the actuation method which are suitable for assembling of micro-sized parts are studied. And applying these principles, a prototype of a micromanipulator to hancle imm-sized parts has been developed successfully. As magnetic force is better than electrostatic force in many aspects for small scale manipulation, the manipulation is realized by handling a permanent magnet in the magnetic fieldwhich is generated by electric current in a coil. A micro coil array can be fabricated on a siliconwafer by a semiconductor process. Several numbers of permanent magnets can be manipulated simultaneously by controling the pattern of the magnetic field. These magnets push the object to the desired position by controlling the magnetic field. This is the fundamental principle of handling objects.Inthe last year, anothermicromanipulating system has been developed. Lorentz force is used for this new system and 3D structures can be assembled by controlling the magnetic fields outside.