Study on Micromanipulator

仅仅减小通常尺寸的机械手的尺寸并不足以获得处理微米大小的机械部件的完整性能。这意味着适当的结构和控制方法对于微操作手是必不可少的。本研究对适合于微小零件装配的结构和驱动方法进行了研究。并应用这些原理，成功地研制出了一台用于加工微小零件的微操作手样机。由于磁力在很多方面都优于静电力，因此可以通过在磁场中操纵由线圈中的电流产生的永磁体来实现操纵。微线圈阵列可以通过半导体工艺在硅片上制造。通过控制磁场的模式，可以同时操作多个永磁体。这些磁铁通过控制磁场将物体推到想要的位置。这是处理物体的基本原理。在过去的一年里，又开发了一个微操作系统。这种新系统采用洛伦兹力，通过控制外部磁场可以组装出三维结构。

Only reducing the size of a usual-size manipulator is not enough to get complete performaces to handle micrometer-sized mechanical parts. That means that appropriate structures and control methods are neccesary for a micromanipulator. In this research, the structure and the actuation method which are suitable for assembling of micro-sized parts are studied. And applying these principles, a prototype of a micromanipulator to hancle imm-sized parts has been developed successfully. As magnetic force is better than electrostatic force in many aspects for small scale manipulation, the manipulation is realized by handling a permanent magnet in the magnetic fieldwhich is generated by electric current in a coil. A micro coil array can be fabricated on a siliconwafer by a semiconductor process. Several numbers of permanent magnets can be manipulated simultaneously by controling the pattern of the magnetic field. These magnets push the object to the desired position by controlling the magnetic field. This is the fundamental principle of handling objects.Inthe last year, anothermicromanipulating system has been developed. Lorentz force is used for this new system and 3D structures can be assembled by controlling the magnetic fields outside.