Study on Micromanipulator

对于微米级的机械零件，仅仅减小机械手的尺寸是不够的。这意味着合适的结构和控制方法是必要的显微操作。本研究针对微尺寸零件的组装，探讨适合微尺寸零件组装的驱动结构与驱动方式。并应用这些原理，研制成功了一台用于加工imm尺寸零件的微操作器样机。由于磁力在许多方面优于静电力，因此对于小尺度操纵，操纵是通过在线圈中通过电流产生的磁场中操纵永磁体来实现的。微线圈阵列可以通过半导体工艺制造在硅晶片上。通过控制磁场的模式，可以同时操纵多个永磁体。这些磁铁通过控制磁场将物体推到所需的位置。这是处理物体的基本原理。去年，另一种显微操作系统被开发出来。这种新系统利用洛伦兹力，通过控制外部磁场可以组装3D结构。

Only reducing the size of a usual-size manipulator is not enough to get complete performaces to handle micrometer-sized mechanical parts. That means that appropriate structures and control methods are neccesary for a micromanipulator. In this research, the structure and the actuation method which are suitable for assembling of micro-sized parts are studied. And applying these principles, a prototype of a micromanipulator to hancle imm-sized parts has been developed successfully. As magnetic force is better than electrostatic force in many aspects for small scale manipulation, the manipulation is realized by handling a permanent magnet in the magnetic fieldwhich is generated by electric current in a coil. A micro coil array can be fabricated on a siliconwafer by a semiconductor process. Several numbers of permanent magnets can be manipulated simultaneously by controling the pattern of the magnetic field. These magnets push the object to the desired position by controlling the magnetic field. This is the fundamental principle of handling objects.Inthe last year, anothermicromanipulating system has been developed. Lorentz force is used for this new system and 3D structures can be assembled by controlling the magnetic fields outside.