Developmental Research of Microrobots

这项研究的目的是开发内部有计算机作为智能的微型机器人。为此，应用IC（集成电路）工艺在硅片上开发亚毫米（小于1mm）尺寸的微机械部件。并在微机械部件上制作了集成电路，完成了微机器人系统。这个研究项目开始至今已经三年了。第一年开发了几种微机械零件。它们是微齿轮（直径为0.2mm），微连杆（长度为0.15mm）等。它们都可以围绕硅片上的引脚旋转。微机械系统的加工技术已经完成。此外，静电微动器也研制成功。首先研制了简单悬臂式微致动器。为了更有效地利用静电，研制了梳状微致动器。设计了悬臂式和梁式两种结构。梳状部件由弹性梁支撑。交流固有频率作为机械振动系统引起的共振振动，可以获得较大的振幅。本研究的重要概念是“基于昆虫模型的机器人”。在昆虫中，我们可以找到许多非常适合小尺寸的合理结构和驱动系统。对于一般尺寸的机器人来说，人类或动物都是很好的设计模型。但对于微型机器人来说，昆虫将是一个很好的模型。已经进行了一些试验来构建类似于昆虫的微观机制。

The purpose of this research is to develop microrobots which have computers inside as intelligence.For this purpose IC (integrated circuit) Process is applied to develop micromechanical parts of sub-mm (smaller than 1mm) size on silicon wafers. And IC circuits are fabricated on micromechanical parts and microrobots system are completed.Three years have passed after this research project started. In the fitst year some kinds of micromechanical parts were developed. They are mivrogears (diameter is 0.2mm), microlinkaes (lengrh is 0.15mm) and so on. All of them can be rotated around pins developed on silicon wafers. Technologies to process mieromechanical systems has been completed.Furthermore electrostativ mivroactuators are also developed successfully. First simple cantilever type microactuators were developed. To use electrostatic force more effectively, comb-shaped type microctuators have been deveoped. Both of cantilever type and beam type were developed. Comb parts are supported by elastic beam. AC of natural frequency as mechanical vibration system causes resonant vibration and large amplitude can be obtained.Important concept of this research is "Insect model based robotics. " In insects we can find many reasonable stru ctures and actuation systems very good for small size. For robots of usual size human or animals are good model to design them. But for microrobots insects will be good model. Some trials heve been developed to construct micromechanisms similar to insects.