Developmental Research of Microrobots

本研究的目的是开发以计算机为智能核心的微型机器人，为此，采用集成电路工艺在硅片上开发亚毫米(小于1 mm)尺寸的微机械部件。并在微机械部件上制作了集成电路电路，完成了微型机器人系统。在第一年，几种微型机械零件被开发出来。它们是微型耳片(直径为0.2 mm)、微连杆(长度为0.15 mm)等。它们都可以绕着硅片上的针脚旋转。完成了微机械系统的加工技术，研制成功了静电微执行器。首先研制了简单的悬臂式微致动器。为了更有效地利用静电力，研制了梳状微电机。开发了悬臂式和梁式两种结构形式。梳子零件由弹性梁支承。交流固有频率的交流作为机械振动系统产生的共振振动，可以获得较大的振幅。本研究的重要概念是“基于昆虫模型的机器人学”。在昆虫中，我们可以找到许多合理的结构和驱动系统，非常适合于小型昆虫。对于一般大小的机器人来说，人类或动物是设计它们的好模型。但对于微型机器人来说，昆虫将是一个很好的模式。已经开展了一些试验，以构建类似昆虫的微观机制。

The purpose of this research is to develop microrobots which have computers inside as intelligence.For this purpose IC (integrated circuit) Process is applied to develop micromechanical parts of sub-mm (smaller than 1mm) size on silicon wafers. And IC circuits are fabricated on micromechanical parts and microrobots system are completed.Three years have passed after this research project started. In the fitst year some kinds of micromechanical parts were developed. They are mivrogears (diameter is 0.2mm), microlinkaes (lengrh is 0.15mm) and so on. All of them can be rotated around pins developed on silicon wafers. Technologies to process mieromechanical systems has been completed.Furthermore electrostativ mivroactuators are also developed successfully. First simple cantilever type microactuators were developed. To use electrostatic force more effectively, comb-shaped type microctuators have been deveoped. Both of cantilever type and beam type were developed. Comb parts are supported by elastic beam. AC of natural frequency as mechanical vibration system causes resonant vibration and large amplitude can be obtained.Important concept of this research is "Insect model based robotics. " In insects we can find many reasonable stru ctures and actuation systems very good for small size. For robots of usual size human or animals are good model to design them. But for microrobots insects will be good model. Some trials heve been developed to construct micromechanisms similar to insects.