Developmental Research of Microrobots

本研究的目的是研制具有计算机智能的微型机器人，为此采用IC（集成电路）工艺在硅片上研制亚毫米（小于1mm）尺寸的微机械零件。在此基础上，完成了微机械零件的集成电路制作和微机器人系统的研制。在第一年，一些微机械零件被开发出来。它们是微齿轮（直径为0.2mm）、微连杆（半径为0.15mm）等，它们都可以绕硅片上的销钉旋转。完成了微机械系统的加工工艺，研制成功了静电微驱动器。第一个简单的悬臂式微致动器被开发出来。为了更有效地利用静电力，人们研制了梳形微执行器。开发了悬臂式和梁式两种结构。梳齿部分由弹性梁支撑。机械振动系统的固有频率的交流引起共振，可以获得大振幅的振动。“在昆虫中，我们可以找到许多合理的结构和驱动系统，非常适合小尺寸。对于一般大小的机器人，人类或动物是设计它们的好模型。但对于微型机器人来说，昆虫将是一个很好的模型。一些实验已经发展到构建类似于昆虫的微观机制。

The purpose of this research is to develop microrobots which have computers inside as intelligence.For this purpose IC (integrated circuit) Process is applied to develop micromechanical parts of sub-mm (smaller than 1mm) size on silicon wafers. And IC circuits are fabricated on micromechanical parts and microrobots system are completed.Three years have passed after this research project started. In the fitst year some kinds of micromechanical parts were developed. They are mivrogears (diameter is 0.2mm), microlinkaes (lengrh is 0.15mm) and so on. All of them can be rotated around pins developed on silicon wafers. Technologies to process mieromechanical systems has been completed.Furthermore electrostativ mivroactuators are also developed successfully. First simple cantilever type microactuators were developed. To use electrostatic force more effectively, comb-shaped type microctuators have been deveoped. Both of cantilever type and beam type were developed. Comb parts are supported by elastic beam. AC of natural frequency as mechanical vibration system causes resonant vibration and large amplitude can be obtained.Important concept of this research is "Insect model based robotics. " In insects we can find many reasonable stru ctures and actuation systems very good for small size. For robots of usual size human or animals are good model to design them. But for microrobots insects will be good model. Some trials heve been developed to construct micromechanisms similar to insects.