Automated Design of Microrobot Processing

微型机器人加工自动化设计

• 批准号: 02452130
• 负责人: MIURA Hirofumi
• 金额: $ 3.97万
• 依托单位: The University of Tokyo
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (B)
• 财政年份: 1990
• 资助国家: 日本
• 起止时间: 1990 至 1991
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-02452130/
• 关键词: Microrobot; CVD; Process for semiconductor; Etching; Planning

Microrobots which this research is going to develop mean micromechanical systems of 1mm-2mm size having micromechanisms and microe1ectronic logic circuit. For development of micromechanism, IC process is being applied now. That means microrobots are developed on silicon wafers.The purpose of this research is to develop software systems which automatically generates process sequences of IC processes (CVD-Chemical Vapor Deposition, Etching, Lithograph and so on) to obtain desired micromechanical systems.Available IC processes in our laboratory are CVD, vacuum evaporation, plasma etching, and wet etching with chemicals for instance fluoric acid. The problem to decide the best combination of processes selecting from limited numbers of processes and sequence of them is planning problem in the field of artificial intelligence. It is a very interesting subject.The main result in the first year of the term of project is the following. The process is expressed as the semi-directed graph considering priority of IC processes. Planning is completed when one line sequence is obtained after repetitive transformation under decided rules.Another result is the development of simulation software of growth of thin films. If sequences of process and mask patters are given, cross sections of developed thin film layers.In the last year of the project, a soft ware system for concept design of actuator was developed. In this system concept design of actuator is processed in conversation mode between a human and a computer.

本研究所要发展的微机器人是指具有微机械结构和微电子逻辑电路的1 mm-2 mm尺寸的微机械系统。为了发展微机械，目前正在采用IC工艺。这意味着微型机器人是在硅晶片上开发的。本研究的目的是开发软件系统，自动生成IC工艺（CVD-化学气相沉积，蚀刻，光刻等）的工艺序列，以获得所需的微机械系统。在我们的实验室可用的IC工艺是CVD，真空蒸发，等离子体蚀刻，和化学品湿蚀刻，如氢氟酸。从有限的工艺序列中选择最佳工艺组合的问题是人工智能领域的规划问题。这是一个非常有趣的课题。项目第一年的主要成果如下。考虑集成电路工艺的优先级，将工艺表示为半有向图。在确定的规则下反复变换得到一条线序列，即完成了规划。如果给出工艺顺序和掩模图形，则可以得到显影薄膜层的横截面。在项目的最后一年，开发了用于致动器概念设计的软件系统。在该系统中，执行机构的概念设计是在人机对话模式下进行的。

项目成果

Kunioh Tsubota et al.: "Support System for Concept Design of Microrobot using Smalltalk" Proc. of Second Smalltalk Symposium. 133-141 (1991)

Kunioh Tsubota 等人：“使用 Smalltalk 的微型机器人概念设计支持系统”Proc。

坪田 邦央,鈴木 健司,下山 勲,三浦 宏文: "Smalltalkによるマイクロロボットの概念設計支援システム" 第2回Smalltalkシンポジウム論文集. 133-141 (1991)

Kunio Tsubota、Kenji Suzuki、Isao Shimoyama、Hirofumi Miura：“使用 Smalltalk 的微型机器人概念设计支持系统”第二届 Smalltalk 研讨会论文集 133-141 (1991)。

Toshiki Hirano et al.: "Automated Design of Microrobot Processing" Proc. of Coference on Robotics and Mechatronics of JSME. 381-382 (1990)

Toshiki Hirano 等人：“微型机器人处理的自动化设计”Proc。

Isao Shimoyama et al.: "Idea Processor for Design of Microrobot" Proc. of Second International Symposium on Micromachine and Human Science.

Isao Shimoyama 等人：“微型机器人设计的创意处理器”Proc。

Isao Shimoyama;Kunio Tsubota;Hirofumi Miura: "Idea Proccessor for Design of ulicrorobts" Second International Symposium on Micro Machine and Human Science.

Isao Shimoyama;Kunio Tsubota;Hirofumi Miura：“微型机器人设计的创意处理器”第二届国际微型机械与人类科学研讨会。