Automated Design of Microrobot Processing

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Microrobots which this research is going to develop mean micromechanical systems of 1mm-2mm size having micromechanisms and microe1ectronic logic circuit. For development of micromechanism, IC process is being applied now. That means microrobots are developed on silicon wafers.The purpose of this research is to develop software systems which automatically generates process sequences of IC processes (CVD-Chemical Vapor Deposition, Etching, Lithograph and so on) to obtain desired micromechanical systems.Available IC processes in our laboratory are CVD, vacuum evaporation, plasma etching, and wet etching with chemicals for instance fluoric acid. The problem to decide the best combination of processes selecting from limited numbers of processes and sequence of them is planning problem in the field of artificial intelligence. It is a very interesting subject.The main result in the first year of the term of project is the following. The process is expressed as the semi-directed graph considering priority of IC processes. Planning is completed when one line sequence is obtained after repetitive transformation under decided rules.Another result is the development of simulation software of growth of thin films. If sequences of process and mask patters are given, cross sections of developed thin film layers.In the last year of the project, a soft ware system for concept design of actuator was developed. In this system concept design of actuator is processed in conversation mode between a human and a computer.