Synthesis of B-C-N Superhard Thin Films by Ion-Beam-Assisted Deposition

离子束辅助沉积法合成 B-C-N 超硬薄膜

• 批准号: 11650124
• 负责人: MATSUMURO Akihito
• 金额: $ 2.24万
• 依托单位: Nagoya University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2000
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-11650124/
• 关键词: B-C-N Thin Films; Superhard Coating; Ion-Beam-Assited Method; Hardness; Microstructure; Cubic Phase; イオンビームプロセ; 微細組織

B-C-N films have been synthesized by an ion-beam-assisted deposition technique, in which boron and carbon were evaporated by electron beam and a mixed nitrogen and argon ion beam was simultaneously irradiated onto silicon (100) substrates. The ratio of argon ions to nitrogen ions was varied by the flow rate ratio of Ar and N_2 gases fed into the ion source. In this experiment, the influence of the ratio on the mechanical properties and the microstructure were investigated.(1) Nano-indentation studies show the maximum hardness up to 23 GPa at the gas ratio of 25-50 %.(2) The films prepared under the appropriate conditions indicated low friction coefficients of 0.04-0.08 against a sapphire ball and excellent wear resistance.(3) The existence of a cubic B-C-N like phase in the film, which has been predicted as one of new hard materials, was revealed by various micro-structural analyses.(4) It was concluded that the excellent mechanical properties prepared at the optimum gas ratio could be attributed to the appearance of the new cubic like phase.

采用离子束辅助沉积技术，在Si（100）衬底上用电子束蒸发B和C，同时用氮氩混合离子束辐照，制备了B-C-N薄膜。氩离子与氮离子的比例随注入离子源的Ar和N_2气体的流量比而变化。在本实验中，对力学性能和显微组织的影响的比例。(1)纳米压痕研究表明，最大硬度高达23 GPa的气体比例为25- 50%。(2)在适当的条件下制备的薄膜显示出对蓝宝石球的0.04-0.08的低摩擦系数和优异的耐磨性。(3)各种显微结构分析表明，薄膜中存在立方B-C-N类相，被预测为一种新型硬质材料。(4)结果表明，在最佳气体配比下制备的合金具有优异的力学性能是由于新的类立方相的出现。

项目成果

松室昭仁: "イオンビーム支援蒸着法によるB-C-N系薄膜の創成と機械的性質の評価"2000年日本精密工学会秋季大会学術講演会講演論文集. 489-489 (2000)

Akihito Matsuuro：“通过离子束辅助气相沉积创建 B-C-N 薄膜并评估机械性能”日本精密工程学会 2000 年秋季会议记录 489-489 (2000)。

加藤芳正: "イオンビーム支援蒸着法によるB-C-N系薄膜の創成"日本金属学会講演概要(1999年秋期大会). 38. 276-276 (1999)

Yoshimasa Kato：“通过离子束辅助气相沉积创建 B-C-N 薄膜”日本金属学会演讲摘要（1999 年秋季会议）。 38. 276-276 (1999)。

A.Matsumuro: "Synthesis of B-C-N Thin Films by Ion-Beam-Assisted Deposition and Their Mechanical Properties"Proc.MRS 2000 Fall Meeting. (in press). (2001)

A.Matsumuro：“通过离子束辅助沉积合成 B-C-N 薄膜及其机械性能”Proc.MRS 2000 秋季会议。

A.Matsumuro, Y.Kato and H.Ohta: "Synthesis of B-C-N Thin Films by Ion-Beam-Assisted Deposition and Their Mechanical Properties"Proc. MRS 2000 Fall Meeting. (in press).

A.Matsumuro、Y.Kato 和 H.Ohta：“离子束辅助沉积法合成 B-C-N 薄膜及其机械性能”Proc。

A.Matsumuro: "Synthesis of B-C-N Thin-Films by Ion-Beam-Assisted Deposition and Their Mechanical Properties"Proc.MRS 2000 Fall Meeting. (in press). (2001)

A.Matsumuro：“离子束辅助沉积合成 B-C-N 薄膜及其机械性能”Proc.MRS 2000 秋季会议。