Effects of Inter-molecular Interaction of Surface Adsorbed Molecules in Synchrotron Radiation Stimulated CVD

点击翻译按钮获取中文摘要

Surface SiHn on the Si (100) was in situ observed during the synchrotron radiation simulated Si gas source MBE by using the buried metal layr infrared reflection absorption spectroscopy. SiH was mainly observed at around 400 C,and SiH_2 and SiH_3 appeared and increased with decreasing substrate temperature. SiH_2 and SiH_3 were decomposed by the SR irradiation, but SiH was not decomposed.Carbon contamination was investigated in the Al thin films deposited by the SR irradiations on the low temperature condensed layr of dimethyl aluminum hydride. The excitation wavelength dependence of the carbon contamination was measured by using LiF,C,and Al thin film filters. It was found that the carbon contamination was not decreased by the valence electron excitations, but decreased to about 1/2 by the core electron excitations. The deposition yield is two or three orders of magnitude larger in the core electron excitations compared with the valence electron excitations.