Secondary Cure of Laminated Patterns by Photofabrication

光刻技术有望成为一种新的图形制造技术。由计算机控制的光斑激光三维绘图仪在商业上是可用的。然而，由于激光控制器和发生器的成本较高，以及多层图案的片层表面的形成，这些器件并没有得到广泛的应用。制作了一种新的器件，该器件配备了汞氙灯和光纤，并通过该器件的紫外光从底部固化了多层图案。多层图案的侧面为板层状。为了抑制片层表面的形成，侧平面被设置在玻璃容器中的光聚合物的底部，并再次暴露在紫外光下。曝光后，片状硅表面的形成受到明显抑制，表面粗糙度(Rmax)约为10微米。

Photofabrication is expected as a new technology for pattern manufacturing. Three dimensional plotter devices by computer controlled spot laser beam are available commercially. However, these devices are not widely applied due to the high cost of the laser beam controller and generator and the formation of a lamellar surface in multilayr patterns.A new device that is equipped with a mercury xenon lamp and an optical fiber was manufactured and multilayr patterns cured from the bottom by UV-rays of the device were fabricated. Side planes of the multilayr patterns were lamellar. In order to suppress lamellar surface formation, the side planes were set at the bottom of the phptopolymer in a glass vessel and re-exposed to UV-rays. After the exposure, lamellar sirface formation wassuppressed markedly and surface roughness (Rmax) was about 10 mum.