Secondary Cure of Laminated Patterns by Photofabrication

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Photofabrication is expected as a new technology for pattern manufacturing. Three dimensional plotter devices by computer controlled spot laser beam are available commercially. However, these devices are not widely applied due to the high cost of the laser beam controller and generator and the formation of a lamellar surface in multilayr patterns.A new device that is equipped with a mercury xenon lamp and an optical fiber was manufactured and multilayr patterns cured from the bottom by UV-rays of the device were fabricated. Side planes of the multilayr patterns were lamellar. In order to suppress lamellar surface formation, the side planes were set at the bottom of the phptopolymer in a glass vessel and re-exposed to UV-rays. After the exposure, lamellar sirface formation wassuppressed markedly and surface roughness (Rmax) was about 10 mum.