Secondary Cure of Laminated Patterns by Photofabrication

通过光加工对层压图案进行二次固化

• 批准号: 07650153
• 负责人: OTANI Toshikatsu
• 金额: $ 1.54万
• 依托单位: NIHON University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07650153/
• 关键词: Photofabrication; Photopolymer; Laminated Pattern; Optical Fiber; Secondary Cure; UV-rays; 硬化; 二次露光

Photofabrication is expected as a new technology for pattern manufacturing. Three dimensional plotter devices by computer controlled spot laser beam are available commercially. However, these devices are not widely applied due to the high cost of the laser beam controller and generator and the formation of a lamellar surface in multilayr patterns.A new device that is equipped with a mercury xenon lamp and an optical fiber was manufactured and multilayr patterns cured from the bottom by UV-rays of the device were fabricated. Side planes of the multilayr patterns were lamellar. In order to suppress lamellar surface formation, the side planes were set at the bottom of the phptopolymer in a glass vessel and re-exposed to UV-rays. After the exposure, lamellar sirface formation wassuppressed markedly and surface roughness (Rmax) was about 10 mum.

光刻技术有望成为一种新的图形制造技术。由计算机控制的光斑激光三维绘图仪在商业上是可用的。然而，由于激光控制器和发生器的成本较高，以及多层图案的片层表面的形成，这些器件并没有得到广泛的应用。制作了一种新的器件，该器件配备了汞氙灯和光纤，并通过该器件的紫外光从底部固化了多层图案。多层图案的侧面为板层状。为了抑制片层表面的形成，侧平面被设置在玻璃容器中的光聚合物的底部，并再次暴露在紫外光下。曝光后，片状硅表面的形成受到明显抑制，表面粗糙度(Rmax)约为10微米。

项目成果

大谷利勝,星野和義,他2名: "光ファイバで導光した紫外線による光造形法" 日本機械学会論文集.

Toshikatsu Otani、Kazuyoshi Hoshino 等 2 人：“利用光纤引导的紫外光进行立体光刻”，日本机械工程师学会会刊。

大谷利勝,星野和義,他: "光ファイバで導光した紫外線による光造形法" 日本機械学会論文集C編. 63・608(4月号 未定). (1997)

Toshikatsu Otani、Kazuyoshi Hoshino 等人：“利用光纤引导的紫外光进行立体光刻”，日本机械工程师学会会刊，C 版 63, 608（4 月号，未定）。

Toshikatsu OTANI,Kazuyoshi HOSHINO,Mitsuteru NOMOTO and Hayao EGUCHI: "Photofabrication by UV Ray Thought Optical Fiber" TRNSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS (C). 63 (April) -608. (1997)

Toshikatsu OTANI、Kazuyoshi HOSHINO、Mitsuteru NOMOTO 和 Hayao EGUCHI：“利用紫外线思想光纤进行光加工”日本机械工程师学会交易 (C)。