Development of new micromachining technology by laser microfabrication technique

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In recent years laser microfabrication utilizing stereolithography of photopolymers have been a subject of considerable interest for their ability to fabricate real three-dimentional microstructures which exhibit prospective applications on the fields such as new types of micromachine, integrated microfluid sensor and photoelectronic devices and so forth, on which conventional techniques including semiconductor IC technology suitable only for two dimensional structures have met severe difficulties.To develop new micromachining technique satisfying real three-dimensional fabrication, we proposed stereolithography of one photon absorption process by laser microfabrication system consisting of a picosecond pulsed laser and an optical microscope, and explored that fabrication of microstructure by photopolymerization of a light curing resin. WHen the ultra violet light curing resin (Nopcocure 800) placed between two glass plates on the microscope stage was irradiated with 355nm laser pulses (-30 ps, 10Hz) within a second, a formation of resin in the vicinity of the focal spot of the laser beam was observed. Further irradiation of the focused laser pulses on the bottom glass plate resulted in a formation of a rod-shaped resin with 1 mum formation resolution. The resolution of the fabrication methodology was strongly dependent on the laser intensity and was determined by atomic force microscope. And we succeeded fabrication of a rectangular tube of 50 mum x 10 mum x 10 mum was fabricated layr by layr in Z direction with step length 0.5 mum. To testify the the spatial selection capability of structure fabrication, a rod was fabricated between the two broader sidewall. The success of fabrication was approved from SEM image. Actually, microstructures with larger aspect ratio have been fabricated without principle difficulty by the present fabrication technique.