STUDY OF TWO-DEMENSIONAL HYDROGEN ANALYSISUSING NANOFOCUSED ELECTRON BEAM

本课题是为了提高扫描电子刺激解吸离子显微镜（SESDIM）的空间分辨率，实现表面氢的定量分析而开展的。我们用直径为12μm的PbO管实现了小于0.7 μm的空间分辨率。SESDIM还可用于氧离子的探测，氧离子的成像比质子成像分辨率高。对贮氢合金（V，Ti，Ni系）的实际应用表明，氢存在于V的基体表面，而氧则存在于Ti和Ni氧化物的晶界。由于低能离子散射装置实验的延迟，尚未建立定量分析。

This project has been started in order to improve the spatial resolution of a scanning electron-stimulated desorption ion microscope (SESDIM) and to accomplish a quantitative analysis of surface hydrogen, We have achieved the spatial resolution with smaller than 0.7 μm using PbO pipes of 12μm in diameter. The SESDIM is also useful to detect oxygen and imageing of oxygen ion is better resolution than proton image. A practical application to the hydrogen storage alloys (V,Ti,Ni system) shows that hydrogen exist on the matrix surface of V and oxygen localizes at the grain boundary of Ti- and Ni-oxides, A quantitative analysis has not yet been established because delay of an experiment of the low-energy ion scattering apparatus.