STUDY OF TWO-DEMENSIONAL HYDROGEN ANALYSISUSING NANOFOCUSED ELECTRON BEAM

为了提高扫描电子刺激解吸离子显微镜（SESDIM）的空间分辨率，实现对表面氢的定量分析，本课题采用直径为12μm的PbO管，实现了小于0.7 μm的空间分辨率。SESDIM还可用于探测氧，氧离子成像比质子成像分辨率更高。在储氢合金（V、Ti、Ni系）中的实际应用表明，氢存在于V基体表面，氧存在于Ti和Ni氧化物的晶界处。由于低能离子散射装置实验的延迟，尚未建立定量分析。

This project has been started in order to improve the spatial resolution of a scanning electron-stimulated desorption ion microscope (SESDIM) and to accomplish a quantitative analysis of surface hydrogen, We have achieved the spatial resolution with smaller than 0.7 μm using PbO pipes of 12μm in diameter. The SESDIM is also useful to detect oxygen and imageing of oxygen ion is better resolution than proton image. A practical application to the hydrogen storage alloys (V,Ti,Ni system) shows that hydrogen exist on the matrix surface of V and oxygen localizes at the grain boundary of Ti- and Ni-oxides, A quantitative analysis has not yet been established because delay of an experiment of the low-energy ion scattering apparatus.