STUDY OF RENEUTRALIZATION PROBABILITY OF DESORBED ION

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Recently study of hydrogen behaviors on the solid surfaces has been important subject. We have developed a scanning electron-stimulated desorption ion microscopy (SESDIM) that measures hydrogen and oxygen maps on the solid surfaces. Main subject of this project was study of reneutralization probability of desorbed ions using ion beam. The intensive study resulted in following. 1) Improvement of a spatial resolution is achieved in 700 nm. 2) A chemical state analysis of hydrogen has been developed by kinetic energy-peak separation of desorbed ion. The chemical state analysis of hydrogen and oxygen on the line and space consisting of silicon and silicon oxides has been succeeded in the same resolution. 3) High speed measurement has been achieved, because of 30 times speed-up measurement, imaging of five elemental maps takes 90 min with 128×128 pixcels. 5) Reneutralization probability of desorbed proton stimulated by electron has been estimated by in-situ measurements of TOF-type elastic recoil direct detection (ERDA). This is effective to estimate amounts of adsorbed hydrogen. This is based on that the ERDA measures total amounts of hydrogen.