Developmental research of an analyser for dynamical surface reaction processes having high-sensitive hydrogen detection

高灵敏氢检测动态表面反应过程分析仪的研制

• 批准号: 02555005
• 负责人: UEDA Kazuyuki
• 金额: $ 3.52万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Developmental Scientific Research (B)
• 财政年份: 1990
• 资助国家: 日本
• 起止时间: 1990 至 1991
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02555005/
• 关键词: Electron Stimulated Desorption; Time-of-flight; Adsorption of Hydrogen; TOF-ESD; Hydrogen Detection; Hydrogen; Hydrogen Termination; ESD; Electron stimulated desorption,; Hydrogen detection,; Dynamic observation,; Adsorption of hydrogen,; Time

A study of interaction between hydrogen and solid surfaces becomes important problem in surface science concerning with constructions of nano-scale devices in VLSI technology. In order to passivate surface bonds for oxidation and to get a hydrogen mediated epitaxy, a surface estabilization and bond termination by atomic hydrogen adsorption are recently used. However, effective surface analyser to detect hydrogen is not commercially available. In the present, study it was a purpose to develop a new surface tool for dynamical analysis of hydrogen. Electron stimulated desorption (ESD) method using a time of flight technique makes a possible to detect hydrogen combining with conventional surface analyzers. We have succeeded to develop a time-of-flight type ESD apparatus adopting, microchannel plates which has allowed not only hydrogen detection with high sensitivity but also surface structure and surface composition analysis in the modes of LEED-AES. The detection limit of this apparatus for adsorbed hydrogen is about 0.01 monolayer.

氢与固体表面相互作用的研究是超大规模集成电路（VLSI）技术中纳米级器件构建的重要表面科学问题。为了钝化氧化的表面键并获得氢介导的外延，最近使用了通过原子氢吸附的表面稳定和键终止。然而，用于检测氢的有效表面分析仪在商业上不可得。研制一种新的表面氢动态分析工具是目前研究的一个目的。利用飞行时间技术的电子激励解吸（ESD）方法与传统的表面分析仪相结合，使氢的检测成为可能。我们已经成功地开发了一种采用微通道板的飞行时间型ESD装置，该装置不仅允许以高灵敏度进行氢检测，而且还允许以LEED-AES模式进行表面结构和表面成分分析。该装置对吸附氢的检测极限约为0.01单层。

项目成果

A.Takano: "A Study of Oxygen Adsorption Process on a Titanium Single Crystal Surface by Electron Stimulated Desorption." Surface Sci.242. 450-453 (1991)

A.Takano：“通过电子刺激解吸研究钛单晶表面的氧吸附过程。”

H.Nakayama: "Surface Wave Excitation Auger Electron Spectroscopy of Si(001)Reconstructed Surfaces." Ultramicroscopy. 39. 329-341 (1991)

H.Nakayama：“Si(001) 重建表面的表面波激发俄歇电子能谱。”

上田 一之: "電子励起イオン脱離実験による真空の質の検討" 真空. 34. 834-840 (1991)

Kazuyuki Ueda：“利用电子激发离子解吸实验研究真空质量”真空。 34. 834-840 (1991)

上田 一之: "電子励起脱離法による固体表面の水素の高感度検知" 表面科学.

Kazuyuki Ueda：“使用电子激发解吸法对固体表面上的氢进行高灵敏度检测”表面科学。

上田 一之: "電子励起脱離法による固体表面の水素の高感度検知" 表面科学. 13.

Kazuyuki Ueda：“使用电子激发解吸法对固体表面上的氢进行高灵敏度检测”表面科学 13。