Developmental research of an analyser for dynamical surface reaction processes having high-sensitive hydrogen detection

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A study of interaction between hydrogen and solid surfaces becomes important problem in surface science concerning with constructions of nano-scale devices in VLSI technology. In order to passivate surface bonds for oxidation and to get a hydrogen mediated epitaxy, a surface estabilization and bond termination by atomic hydrogen adsorption are recently used. However, effective surface analyser to detect hydrogen is not commercially available. In the present, study it was a purpose to develop a new surface tool for dynamical analysis of hydrogen. Electron stimulated desorption (ESD) method using a time of flight technique makes a possible to detect hydrogen combining with conventional surface analyzers. We have succeeded to develop a time-of-flight type ESD apparatus adopting, microchannel plates which has allowed not only hydrogen detection with high sensitivity but also surface structure and surface composition analysis in the modes of LEED-AES. The detection limit of this apparatus for adsorbed hydrogen is about 0.01 monolayer.