Development of Functionally Graded Piezoelectric Actuator for MEMS(Micro Electro Mechanical System) by Powder Process Technology

利用粉末工艺技术开发MEMS（微机电系统）功能梯度压电执行器

• 批准号: 13650771
• 负责人: OKAMURA Hiroshi
• 金额: $ 2.3万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-13650771/
• 关键词: Piezoelectric material; PZT; Actuator; Functionally graded material; Porosity; Classic lamination theory; Infiltration; 国際研究者交流; 中国; 圧電複合材料; 圧電アクチュエータ; 粉体加工プロセス; 傾斜化プロセス; 圧電アクチュエータ設計; 気孔率傾斜化制御

The purpose of this research is to develop the piezoelectric actuator with functionally graded microstructure(FGM) that has a higher mechanical reliability than the conventional non-FGM actuator aiming at the application of the piezoelectric actuator to the micro electro mechanical system(MEMS). The obtained results are described as follows.1. The electrically induced strain in a PZT piezoelectric plate could be gradually changed by introducing compositionally graded structure of PZT/Pt or porosity-graded structure into a PZT piezoelectric plate. These actuators had no adhesive interface at which the fatigue failure take place, and could electrically make a bending deformation.2. The bending displacement property of the FGM piezoelectric actuator depended on the composition profile, and there existed the optimal composition profile that the bending displacement become the maximum. Moreover, the optimal composition profile could be easily predicted by the modified lamination theory.3. T … More he PZT/Pt compositionally graded piezoelectric bimorph actuator with the optimal composition profile exhibited nearly the same bending displacement as the non-graded bimorph actuator. Therefore, PZT/Pt compositionally graded piezoelectric bimorph actuator is estimated to have enhanced mechanical reliability without degradation the bending displacement characteristics. On the other hand, porosity-graded monomorph actuator exhibited a bending displacement characteristics that inferior to the non-graded unimorph actuator. Then, the profile design of physical properties for improvement of the bending displacement characteristics was attempted by modified lamination theory. As a result, it was predicted to be able to improve the bending displacement characteristics by introducing the profile with decreasing the piezoelectric constant and increasing the elastic modulus and the dielectric constant into the FGM monomorph actuator.4. The porosity-graded piezoelectric preform that have high open porosity and that is suitable for the achievement of the profile design for improvement of the bending displacement characteristics could be obtained by powder processing technology. This means that it is possible to fabricate the FGM monomorph actuator with the higher bending displacement and mechanical reliability by infiltration as a next process. Less

本研究的目的是开发具有功能梯度微结构（FGM）的压电致动器，其机械可靠性比传统的非FGM致动器更高，旨在将压电致动器应用于微机电系统（MEMS）。所得结果如下：1.通过在PZT压电板中引入PZT/Pt组分梯度结构或孔隙率梯度结构，可以逐渐改变PZT压电板中的电致应变。这些驱动器没有发生疲劳失效的粘结界面，并且可以电弯曲变形. FGM压电驱动器的弯曲位移特性取决于材料的成分分布，存在使弯曲位移最大的最佳成分分布。此外，修正的分层理论可以很容易地预测最佳的组分分布.不 ...更多信息 具有最佳成分分布的PZT/Pt成分梯度压电双晶片致动器表现出与非梯度双晶片致动器几乎相同的弯曲位移。因此，估计PZT/Pt成分梯度压电双晶致动器具有增强的机械可靠性，而不会降低弯曲位移特性。另一方面，多孔梯度单晶致动器表现出的弯曲位移特性，劣于非梯度单晶致动器。然后，尝试用改进的层合理论进行改善弯曲位移特性的物性剖面设计。结果表明，通过在FGM单晶驱动器中引入减小压电常数、增大弹性模量和介电常数的剖面，可以改善其弯曲位移特性.通过粉末加工技术可以获得具有高开孔率、适合实现改善弯曲位移特性的轮廓设计的孔隙率梯度压电预制体。这意味着可以通过渗透作为下一个过程来制造具有更高弯曲位移和机械可靠性的FGM单晶致动器。少

项目成果

J.-F.Li: "Piezoelectric ceramic/metal bending actuators with functionally graded microstructures"Proceedings of the 7^<th> International Symposium on Functionally Graded Materials. 399-404 (2003)

J.-F.Li：“具有功能梯度微结构的压电陶瓷/金属弯曲执行器”第七届国际功能梯度材料研讨会论文集。

J.-F.Li: "Fabrication and evaluation of porous piezoelectric ceramics and porosity-graded piezoelectric actuators"Journal of American Ceramic Society. (in press). (2003)

J.-F.Li：“多孔压电陶瓷和孔隙率梯度压电执行器的制造和评估”美国陶瓷学会杂志。

J. -F. Li, K. Takagi, N. Terakubo and R. Watanabe: "Electrical and mechanical properties of piezoelectric ceramic/metal composites in the Pb(Zr,Ti)O_3/Pt system"Applied Physics Letters. 79. 2441-2443 (2001)

J.-F.

K. Takagi, J. -F. Li and R. Watanabe: "Development of piezoelectric ceramic actuators with graded porosity"Proceedings of the 7th International Symposium on Functionally Graded Materials, Beijing, (Materials Science Forum). 423-425. 405-410 (2003)

K.高木，J.-F。

李 敬鋒, 高木, 寺久保, 渡辺: "Electrical and mechanical properties of piezoelectric ceramics/metal composites in the Pb (Zr, Ti)O3/Pt system"Applied Physics Letters. 79・15. 2441-2443 (2001)

K. Lee、Takagi、Terakubo、Watanabe：“Pb (Zr, Ti)O3/Pt 系统中压电陶瓷/金属复合材料的电气和机械性能”应用物理快报 79・15 (2001)。