Realization of individual-use oriented micro analysis system for medical diagnostics by micro fabrication technology

A planer micropump with a TiNi shape memory diaphragm actuator was developed。First，TiNi thin film was fabricated by flash evaporation and its dynamic actuation properties were evaluated using a bulge method。The TiNi actuator was assembled to be a pump with a check valve structure fabricated by anisotropic etching and fusion bonding of silicon substrates.The fabricated micropump with 5 mm square TiNi diaphragm showed a maximum pump pressure of several hundreds kPa and a maximum flow rate of about5µL/min.A micro flow sensor with a structure of three platinum bridges of 40µm in width(a central one is a heater，the others were a resistive thermo sensor)on a silicon flow channel of 1 mm in width was fabricated.As a material for a micro mixer，PZT thin film was fabricated by sputtering.In order to obtain a perovskite structure and a high piezoelectric coefficient，it was found that heating rate of higher than 10℃/s during post annealixrg was crucial.The thin film fabricated showed a high piezoelectric coefacient，d I D231西耶D2，of about100p C/N.Micro reactors were fabricated with several microchannels of 200µm to 2 mm in width patterned on silicon substrates and glass covers.With these micro reactors，chmiluminescence reactions between epinephrine and lucigenin were studied using a photcmultiplier and a CCD camera.Chemiluminescence was detected under even low flow rate of 50µL/min of the regents。The chemiluminescence intensity increased due to diffusion of the regents under low flow rate and due to turbulent flow mixing under high flow rate。It was found that a low concentration of epinephrine of 1x10 I D1-7台D1M could be detected by chemiluminescence reaction。

A planer micropump with a TiNi shape memory diaphragm actuator was developed. First, TiNi thin film was fabricated by flash evaporation and its dynamic actuation properties were evaluated using a bulge method. The TiNi actuator was assembled to be a pump with a check valve structure fabricated by anisotropic etching and fusion bonding of silicon substrates. The fabricated micropump with 5mm square TiNi diaphragm showed a maximum pump pressure of several hundreds kPa and a maximum flow rate of about 5 μL/min.A micro flow sensor with a structure of three platinum bridges of 40μm in width (a central one is a heater, the others were a resistive thermo sensor) on a silicon flow channel of 1mm in width was fabricated. As a material for a micro mixer, PZT thin film was fabricated by sputtering. In order to obtain a perovskite structure and a high piezoelectric coefficient, it was found that heating rate of higher than 10℃/s during post annealixrg was crucial. The thin film fabricated showed a high piezoelectric coefacient, dィイD231ィエD2, of about 100p C/N.Micro reactors were fabricated with several microchannels of 200μm to 2mm in width patterned on silicon substrates and glass covers. With these micro reactors, chmiluminescence reactions between epinephrine and lucigenin were studied using a photcmultiplier and a CCD camera. Chemiluminescence was detected under even low flow rate of 50μL/min of the regents. The chemiluminescence intensity increased due to diffusion of the regents under low flow rate and due to turbulent flow mixing under high flow rate. It was found that a low concentration of epinephrine of 1x10ィイD1-7ィエD1M could be detected by chemiluminescence reaction.