Realization of individual-use oriented micro analysis system for medical diagnostics by micro fabrication technology

一个带有钛形状存储器的平面微泵已经开发出来。首先， TiNi薄电影是由闪光蒸发制造的，它的动态动作特性已经用一种膨胀方法进行了评估。TiNi执行器被组装成一个带有检查阀结构的泵，由硅基板的不同形态蚀刻和融合结合。带有5毫米方形TiNi diaphragm的织物微型泵显示了高达百千帕的最大泵压力和约5 μL/min的最大流量速率。一个微型流量传感器，具有宽度为40微米的三根铂桥的结构（一个中央是加热器，另一个是一个有弹性的热传感器），宽度为1毫米的硅流量通道被制造出来。作为一种用于微型混合器的材料， PZT薄膜是由Sputtering制造的。在订购中，发现了一种超声波结构和一种高压电电动节能剂的情况下，它发现了高于10 ° C/s的加热率。The thin film fabricated showed a high piezoelectric coefacient，dy D231 y D2， of about 100 p C/N. Micro reactors were fabricated with several microchannels of 200 m to 2 mm in width patterned on silicon substrates and glass covers。在这些微反应堆中，肾上腺素和荧光素之间的化学反应正在研究使用光cmmultiplier和CCD摄像机。在该地区检测到的Chemiluminescence低于50μL/min的流速。Chemiluminescence的强度增加了在低流量率下的干扰和在高流量率下的湍流流动混合的原因。It was found that a low concentration of epinephrine of 1 x10的D1-7的D1M could be detected by chemiluminescence reaction。

A planer micropump with a TiNi shape memory diaphragm actuator was developed. First, TiNi thin film was fabricated by flash evaporation and its dynamic actuation properties were evaluated using a bulge method. The TiNi actuator was assembled to be a pump with a check valve structure fabricated by anisotropic etching and fusion bonding of silicon substrates. The fabricated micropump with 5mm square TiNi diaphragm showed a maximum pump pressure of several hundreds kPa and a maximum flow rate of about 5 μL/min.A micro flow sensor with a structure of three platinum bridges of 40μm in width (a central one is a heater, the others were a resistive thermo sensor) on a silicon flow channel of 1mm in width was fabricated. As a material for a micro mixer, PZT thin film was fabricated by sputtering. In order to obtain a perovskite structure and a high piezoelectric coefficient, it was found that heating rate of higher than 10℃/s during post annealixrg was crucial. The thin film fabricated showed a high piezoelectric coefacient, dィイD231ィエD2, of about 100p C/N.Micro reactors were fabricated with several microchannels of 200μm to 2mm in width patterned on silicon substrates and glass covers. With these micro reactors, chmiluminescence reactions between epinephrine and lucigenin were studied using a photcmultiplier and a CCD camera. Chemiluminescence was detected under even low flow rate of 50μL/min of the regents. The chemiluminescence intensity increased due to diffusion of the regents under low flow rate and due to turbulent flow mixing under high flow rate. It was found that a low concentration of epinephrine of 1x10ィイD1-7ィエD1M could be detected by chemiluminescence reaction.