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Development of bio-mimetic sensor fusion system for detecting temperature and breath for rescue microrobots

开发用于救援微型机器人的温度和呼吸检测的仿生传感器融合系统

基本信息

批准号：
10450155
负责人：
MAKINO Eiji
金额：
$ 8.58万
依托单位：
HOKKAIDO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1998
资助国家：
日本
起止时间：
1998 至 1999
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10450155/
关键词：
Rescue microrobot Carbon dioxide sensor Infrared thermal sensor Pyroelectric thin film

项目摘要

A quartz crystal balance sensor for detecting carbon dioxide in breath was fabricated using an organic amine compound film as a reactive material with carbon dioxide molecules. It was evaluated with a fabricated standard gas supplying system. The sensor was capable to detect low carbon dioxide concentration gas of 0.04 to 4%, as well as showing a high signal resolution under these concentration region. A reaction speed of the sensor was less than 5min.A typical pyroelectric thin film of PZT for an infrared sensor for detecting temperature was fabricated by sputtering. In order to obtain a perovskite structure of PZT, it was found that temperature rise rate of over 10℃/s for annealing at any ambient gas conditions such as oxygen, nitrogen or atmosphere was key condition, independent of any deposition condition such as a substrate temperature. Effects of deposition conditions on a pyroelectric coefficient of the deposited PZT thin film was studied. Patterning of deposited PZT thin film was capable to perform by reactive ion etching in SFィイD26ィエD2 gas.An electrochemical photoetching technique for fabricating shadow masks was developed for evaporation and sputtering of functional thin films. A micromachining technique for ceramic substrates for infrared sensors was developed using photoetching process in a high temperature phosphoric acid. A micro flow sensor for detecting breath flow was fabricated with a structure of three platinum thin film cantilevers (20μm in width and 1mm in length) used as a heater and two thermal sensors.

采用有机胺化合物薄膜作为二氧化碳分子的反应材料，制作了一种用于检测呼吸中二氧化碳的石英晶体天平传感器。用自制的标准气体供应系统对其进行了评价。该传感器能够检测0.04%至4%的低二氧化碳浓度气体，并且在这些浓度区域下显示出高信号分辨率。该传感器的反应速度小于5 min。采用溅射法制备了用于红外测温传感器的典型PZT热释电薄膜。为了获得PZT的钙钛矿结构，发现在任何环境气体条件（例如氧气、氮气或大气）下退火的超过10℃/s的温度上升速率是关键条件，与任何沉积条件（例如衬底温度）无关。研究了沉积条件对PZT薄膜热释电系数的影响。在SF_（12）D_26 ~（12）D_2气体中，采用反应离子刻蚀方法对沉积的PZT薄膜进行图形化。提出了一种在高温磷酸介质中采用光刻工艺加工红外传感器陶瓷基片的方法。研制了一种用于检测呼吸流量的微流量传感器，该传感器由三个宽20μm、长1 mm的铂薄膜悬臂梁作为加热器和两个热传感器组成。