Development of bio-mimetic sensor fusion system for detecting temperature and breath for rescue microrobots

一个石英晶体平衡传感器，用于在呼吸中检测碳二氧化物，它被制造成一种有机胺复合膜作为含有碳二氧化物分子的反应性材料。它是用一个制造的标准气体供应系统进行评估的。该传感器能够检测到0.04%至4%的低碳二氧化物浓度气体，如在这些浓度区域内显示出高信号分辨率。一个传感器的反应速度小于5分钟，一个典型的焦电薄膜，用于一个红外传感器，用于检测温度是由Sputtering制造的。在订购中，发现了一种PZT的全氟碳化物结构，即超过10℃/s的温度上升率，用于任何环境气体条件，如氧、硝基或大气层是关键条件，独立于任何沉积条件，如物质温度。沉积条件对沉积的PZT薄膜的焦电协同作用的影响已经被研究过。Patterning of Deposited PZT thin film is capable to perform by reactive ion etching in SF-D26-D2 gas.An electrochemical photoetching technique for fabricating shadow mask is developed for evaporation and sputtering of functional thin films.一种用于红外传感器的陶瓷基质的微加工技术已经开发出在高温磷酸盐中使用光蚀刻工艺。一种用于检测气流的微流量传感器被制造成一个由三个平板薄膜薄膜玻璃机组成的结构（宽度为20微米，长度为1毫米），用作加热器和两个热传感器。

A quartz crystal balance sensor for detecting carbon dioxide in breath was fabricated using an organic amine compound film as a reactive material with carbon dioxide molecules. It was evaluated with a fabricated standard gas supplying system. The sensor was capable to detect low carbon dioxide concentration gas of 0.04 to 4%, as well as showing a high signal resolution under these concentration region. A reaction speed of the sensor was less than 5min.A typical pyroelectric thin film of PZT for an infrared sensor for detecting temperature was fabricated by sputtering. In order to obtain a perovskite structure of PZT, it was found that temperature rise rate of over 10℃/s for annealing at any ambient gas conditions such as oxygen, nitrogen or atmosphere was key condition, independent of any deposition condition such as a substrate temperature. Effects of deposition conditions on a pyroelectric coefficient of the deposited PZT thin film was studied. Patterning of deposited PZT thin film was capable to perform by reactive ion etching in SFィイD26ィエD2 gas.An electrochemical photoetching technique for fabricating shadow masks was developed for evaporation and sputtering of functional thin films. A micromachining technique for ceramic substrates for infrared sensors was developed using photoetching process in a high temperature phosphoric acid. A micro flow sensor for detecting breath flow was fabricated with a structure of three platinum thin film cantilevers (20μm in width and 1mm in length) used as a heater and two thermal sensors.