Development of precision goniometer compatible with oxygen atmosphere and ultrahigh temperature for surface analyses of pulsed laser deposition oxide thin films

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The goal of this study is to develop a precise goniometer which can handle the specimen in an environment of any given oxygen pressure from UHV to atmospheric pressure at an elevated temperature of over 1000℃ without any magnetic field noise which would be introduced if the specimen is heated by electric current. Therefore, we chose laser beam as a heat source, In the first year, we have developed simple heating stage and optics for using a cw Nd:YAG laser beam to accomplish highest heating temperature of 1400℃. In the second year, special optical fiber and optics were designed and fabricated to fit this technique to a goniometer having 6-axis motion. The bearings which allow the sample stage to rotate smoothly at high temperature was the most difficult part of this study. Finally, we could fabricate the goniometer having the proposed specification.