Integrated Micro Fluid Power Devices for Micro Motion Systems in Application of Functional Fluids

本项目旨在利用功能流体，实现多自由度微运动系统的集成微流体动力装置。主要研究结果如下：采用均质ER流体的微型ER阀：采用各向同性蚀刻，溅射和阳极键合等微加工方法制造3端口微型ER阀。微型ER阀的电极尺寸为宽度1.2mm，长度5mm，间隙长度0.08mm。对其静、动态特性进行了实验研究。2 .安装微泵的管道内移动微机械：制作了一种直径9mm、长75mm、安装微ER阀和谐振驱动压电微泵的管道内移动微机械，其行走机构为尺蠖式。采用双形态PZT元件的蠕动运动通道微泵：提出了一种采用双形态PZT元件的蠕动微泵。液体的泵送是通过金属薄膜形成的通道的主动蠕动运动来实现的。制作了蠕动微型泵（20mm x 20mm x 2mm），以验证泵送原理并检查其特性。最大输出流量为250mm^3/min，最大负载压力为3.1kPa。聚酰亚胺-隔膜流体微执行器：提出并利用微加工技术制作了聚酰亚胺-隔膜流体微执行器。通过实验阐明了其特点。在此基础上，提出并制作了一种将微ER阀与聚酰亚胺隔膜流体微执行器相结合的阀集成微执行器。膜片尺寸为4 × 4mm^2。输出位移范围为40μm。最后，作为该微驱动器的应用，制作了微夹持器。

This project aims to realize integrated micro fluid power devices for micro motion systems having multi degrees of freedom, making use of functional fluids. Main results are as follows.1. Micro ER Valve Using Homogeneous ER Fluids : A 3-port micro ER valve is fabricated by using micromachining such as isotropic etching, sputter and anodic bonding. The micro ER valve has electrode dimensions of 1.2mm in width, 5mm in length and 0.08mm in gap length. The static and dynamic characteristics are experimentally investigated.2. A Micropump-Mounted In-Pipe Mobile Micromachine : An in-pipe mobile micromachine mounted with the micro ER valve and the resonantly-driven piezoelectric micropump is fabricated with 9mm in diameter and 75mm in length, whose traveling mechanism is an inchworm type.3. A Peristaltic Motion Channel-Type Micro Pump with Bimorph-Type PZT Elements Allay : A novel peristaltic micro pump using bimorph type PZT elements is proposed. The pumping of liquid is realized by active and peristaltic motion of channel formed with metal film. The peristaltic micro pump (20mm x 20mm x 2mm) is fabricated to verify the pumping principle and to examine the characteristics. The maximum output flow rate of 250mm^3/min is obtained and the maximum load pressure of 3.1kPa is obtained.4. Polyimide-Diaphram Fluid Microactuator : A polyimide-diaphragm fluid microactuator is proposed and fabricated by the micromachining. The characteristics are clarified through experiments. Furthermore, a valve-integrated microactuator is proposed and fabricated by combining the micro ER valve and polyimide-diaphragm fluid microactuator. The diaphragm size is 4 x 4mm^2. The output displacement range is 40μm. Finally, as an application of the proposed microactuator, a micro gripper is fabricated.