Research on a New-Type Vibratory Gyro Sensor Using a Single Resonance Mode

提出了一种仅采用单谐振模态的新型音叉式振动陀螺作为高稳定角速率传感器，并对其进行了有限元分析。此外，实验证实，该结构作为角速率传感器操作。现将结论归纳如下。(1)该结构可以在重心线上的基部两侧的两个部分处被支撑，因此几乎不受来自外部的振动的影响。(2)在不锈钢主体的情况下，由支撑部件的固定引起的谐振频率的变化率很小，为5.2ppm。(3)计算了压电陶瓷驱动和检测结构的电阻抗，与实测电阻抗基本一致。(4)测量陀螺仪特性，并确认作为角速率传感器的操作。(5)由于等效电路计算的陀螺特性与实测的陀螺特性不同，必须考虑这一原因，如果采用压电单晶，这种结构将成为一种非常小的角速率传感器。在需要宽频率响应特性的情况下，电感元件应该与检测侧并联连接。这种情况下进行了详细的研究，并在文件中提出。

A new-type tuning fork vibratory gyro that uses only a single resonance mode is proposed as a high stable angular rate sensor, and is analyzed by the finite element method. Furthermore, it is experimentally confirmed that the structure operates as an angular rate sensor. The conclusions are summarized as follows.(1) The structure can be supported at two parts of both sides of the base part on the line of the center of gravity, and therefore is hardly influenced by the vibrations from the outside.(2) The change rate of the resonant frequency by the fixation of the support parts is small with 5.2ppm in the case of the stainless steel body.(3) The electrical impedance of the structure with piezoelectric ceramics for the drive and also detection is calculated, and almost agrees with the measured one.(4) The gyro characteristics are measured, and the operation as an angular rate sensor is confirmed.(5) As the gyro characteristics calculated by the equivalent circuit differ from the measured ones, this reason must be considered in succession.This structure will become a very small angular rate sensor, if a piezoelectric single crystal is used. An inductance element should be connected in parallel with the detection side, in the case that the wide frequency response characteristic is required. This case is studied in detail and is presented in the paper.