Study of Frequency-Change-Type High-Sensitivity Two-Axis Acceleration Sensor

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The construction of a frequency-change-type two-axis acceleration sensor is proposed and is designed using the finite-element method. The analyzed relationship between the applied acceleration and the resonance frequency change becomes linear in this construction. Moreover, methods for realizing high sensitivity are proposed. Selecting the axis to apply the acceleration and using bent support bars are both effective methods to increase sensor sensitivity. The sensor characteristics are measured in the gravitational field. As a result, the analyzed characteristics of the sensor agreed with the experimental ones.