Study of High-Performance Mechanical-Vibration Type Sensor DetectingTwo-Axis Acceleration and One-Axis Angular Rate

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The new piezoelectric high-performance mechanical-vibration type sensor which can detect the acceleration along two axial directions and the angular rate around one axis is proposed in this study. The sensor is designed using a finite-element method, and its trail production is carried out for experimental verification. The sensor differs from the conventional one at the point that acceleration and angular rate are detected using separate vibrators. Acceleration is detected form the shift of the resonance frequency of a vibrator, and angular rate is detected from another vibrator which is a flatly-supported vibration-type gyroscope.