Research on a New Flat-Type High-Sensitivity Force Sensor Utilizing Resonance Frequency change by Axial Force

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In this research, a new flat-type force sensor utilizing the resonance frequency change by the axial force is studied, and the acceleration sensor is also considered as one example of its application, by the finite element analysis. The obtained results are summarized as follows.(1) High sensitivity is realized by using only one flexurally vibrating bar and its out-of-plane mode as the force sensor.(2) The applied axial force and the resonance frequency change have a linear relationship.(3) The sensor has a high quality factor because the vibration displacements at its support portions are extremely reduced.(4) The analysis results showing that the relationship between the applied acceleration and the resonance frequency change is linear were confirmed experimentally.(5) The sensor sensitivities of approximately 2,800ppm/G and 2150ppm/G were realized for the 1st and 2nd modes, respectively.(6) The influences of the undesirable acceleration from other axes can be considerably made small by devising a support method.(7) The spurious vibrations that approach the resonance frequency are not driven experimentally.The temperature characteristic of the sensor should be examined in the future. It is conceivable that this can be solved by the conventional compensation method using the electronic circuit technique. As a future subject, on the basis of the obtained results, this structure may be produced by micro-machining techniques from a single crystal material.