Research on a New Flat-Type High-Sensitivity Force Sensor Utilizing Resonance Frequency change by Axial Force

利用轴向力改变谐振频率的新型扁平型高灵敏度力传感器的研究

• 批准号: 14550048
• 负责人: SUGAWARA Sumio
• 金额: $ 1.86万
• 依托单位: Ishinomaki Senshu University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14550048/
• 关键词: force sensor; flexural vibrator; axial force; resonance freouency change; finite element analysis; acceleration sensor; 横振動棒; 面外モード

In this research, a new flat-type force sensor utilizing the resonance frequency change by the axial force is studied, and the acceleration sensor is also considered as one example of its application, by the finite element analysis. The obtained results are summarized as follows.(1) High sensitivity is realized by using only one flexurally vibrating bar and its out-of-plane mode as the force sensor.(2) The applied axial force and the resonance frequency change have a linear relationship.(3) The sensor has a high quality factor because the vibration displacements at its support portions are extremely reduced.(4) The analysis results showing that the relationship between the applied acceleration and the resonance frequency change is linear were confirmed experimentally.(5) The sensor sensitivities of approximately 2,800ppm/G and 2150ppm/G were realized for the 1st and 2nd modes, respectively.(6) The influences of the undesirable acceleration from other axes can be considerably made small by devising a support method.(7) The spurious vibrations that approach the resonance frequency are not driven experimentally.The temperature characteristic of the sensor should be examined in the future. It is conceivable that this can be solved by the conventional compensation method using the electronic circuit technique. As a future subject, on the basis of the obtained results, this structure may be produced by micro-machining techniques from a single crystal material.

本文通过有限元分析，研究了一种新型的利用轴向力引起的共振频率变化的平面力传感器，并以加速度传感器为例进行了分析。结果表明：(1)只用一根柔性振杆及其离面振型作为力传感器，即可实现高灵敏度。(2)外加轴向力与共振频率变化呈线性关系。(3)由于支承处的振动位移极大地减小，传感器具有较高的品质因数。(4)分析结果表明，外加加速度与共振频率变化呈线性关系。(5)对于第一、二阶振型，传感器的灵敏度约为2800ppm/G和2150ppm/G。(6)通过设计支承方法，可以大大减小来自其他轴的不良加速度的影响。(7)接近共振频率的虚假振动不是实验驱动的。传感器的温度特性应在未来进行检查。可以想象，这可以通过使用电子电路技术的传统补偿方法来解决。作为未来的课题，根据所获得的结果，这种结构可能会通过单晶材料的微加工技术来制造。

项目成果

高橋 淳: "共振周波数変化型加速度センサにおける他軸感度について"日本音響学会講演論文集(II). No.1-P-2 3月. 1281-1282 (2003)

Jun Takahashi：“关于谐振频率可变加速度传感器中其他轴的灵敏度”日本声学学会会议记录（II）No.1-P-2 March（2003）。

Subaru Kudo: "Resonance Frequency of Vibrating Resonator Deformed by Axial Force"Jpn.J.Appl.Phys.. Vol.41, Part 1, 5B. 3439-3441 (2002)

Subaru Kudo：“轴向力变形的振动谐振器的谐振频率”Jpn.J.Appl.Phys.. Vol.41，第 1 部分，5B。

Sumio Sugawara: "Construction of a Flat-Type Force Sensor Using the Frequency Shift by Axial Force"Jpn.J.Appl.Phys.. Vol.4, Part1, No.5B. 3433-3438 (2002)

Sumio Sukawara：“利用轴向力频移构建平面型力传感器”Jpn.J.Appl.Phys.. Vol.4，Part1，No.5B。

Subaru Kudo: "Resonance Frequency of Vibrating Resonator Deformed by Axial Force"Jpn. J. Appl. Phys.. Vol.41, Part1, 5B. 3439-3441 (2002)

工藤昴：“轴向力变形的振动谐振器的谐振频率”Jpn。

Jun Takahashi: "Basic Consideration of a Flat-Type Acceleration Sensor Utilizing Resonance Frequency Change of Flexural Vibrator"Jpn.J.Appl.Phys.. Vol.42, Part1, No.5B. 3124-3129 (2003)

Jun Takahashi：“利用弯曲振动器谐振频率变化的扁平型加速度传感器的基本考虑”Jpn.J.Appl.Phys.. Vol.42，Part1，No.5B。