权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Control of the Structure and properties of Metal Oxide Thin Film Fabricated by the Liquid Phase Deposition Methods

液相沉积法制备金属氧化物薄膜的结构和性能控制

基本信息

批准号：
12305056
负责人：
DEKI Shigehito
金额：
$ 28.21万
依托单位：
Kobe University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12305056/
关键词：
Liquid Phase Deposition Fluorometal complex Titanium oxide Conductive thin film Graded-compositional thin film Liquid phase infiltration Highly dimensional ceramic Nano-alley 酸化スズ液相析出法(LPD)液相含浸法チタン酸バリウムシリカチタニア金微粒子 FGM /

项目摘要

The optimization of the reaction condition of the liquid phase deposition are attempted for the purpose of the control of the structure and properties; such as conductivity and spectroscopic properties, of the formed metal oxide thin films. In this study, we discussed;- Fine structure and the control at the initial stage of the LPD process for the metal oxide thin films- Synthesis of the multiphase thin films- Establishment of the graded compositional thin films.- Growth mechanism of the metal oxide thin film on the complex morphologic surface and development of the Liquid phase infiltration process.We found the epitaxial growth between the substrate and deposited thin film in the initial stage of the metal oxide thin films using LPD process by HR-TEM, EDS etc. For the synthesis of the multiphase thin films, the composition distribution and the optimization depend on the control of the composition of the reaction solution and the temperature.A novel technique for the direct synthesis o … More f thin films with graded composition profiles has been studied in aqueous solution, in which the second phase solutions were added into the master solution under time- and rate-controlled reaction conditions: the composition of the films in the direction of the film thickness was successfully controlled over a wide range by this technique.Finally, A novel technique for the direct synthesis of the three-dimensional metal oxide film with the higher-ordered periodic structure has been studied in aqueous solution. 3D structured TiO_2 films with a diameter from 120 - 1065 nm were fabricated by filling the holes in Si wafer by the Liquid Phase Infiltration (LPI) process, and subsequently removing Si wafer by peeling. TiO_2 have the higher-ordered architectures with the negative shape of the template. It is apparent that and the TiO_2 films were precisely transferred from the template without any voids and seams. The film thickness or filling rate of the TiO_2 can be controlled by the reaction time. The LPI method is desirable for the preparation of the advanced metal oxide film with the highly ordered structure and consequently the optical properties of photonic crystals can be modified on the nanometer scale. Less

对液相沉积的反应条件进行了优化，以控制其结构和性能；所形成的金属氧化物薄膜的电导率和光谱特性。在本研究中，我们讨论了；-金属氧化物薄膜LPD工艺初始阶段的精细结构和控制-多相薄膜的合成-分级成分薄膜的建立。-金属氧化物薄膜在复杂形态表面的生长机理及液相浸润过程的发展。在LPD工艺制备金属氧化物薄膜的初始阶段，通过hrtem、EDS等手段发现了衬底与沉积薄膜之间的外延生长。对于多相薄膜的合成，组分的分布和优化取决于反应溶液的组成和温度的控制。本文研究了一种在水溶液中直接合成具有梯度组成的薄膜的新技术，在时间和速率控制的反应条件下，将二相溶液加入到主溶液中，在膜厚方向上成功地在较宽范围内控制了膜的组成。最后，研究了一种在水溶液中直接合成具有高阶周期结构的三维金属氧化膜的新方法。采用液相浸润法（LPI）填充硅片上的孔，然后用剥离法去除硅片，制备了直径为120 ~ 1065 nm的三维结构TiO_2薄膜。TiO_2具有高阶结构，模板形状为负。结果表明，TiO_2薄膜从模板上准确转移，没有任何空隙和接缝。反应时间可以控制TiO_2的膜厚或填充率。LPI方法是制备具有高度有序结构的先进金属氧化物膜的理想方法，因此光子晶体的光学性质可以在纳米尺度上进行修饰。少