A Development of the Novel Method of Multi-component Metal Oxide Thin Films from Aqueous Solution Process and the Composition Distribution in the Films

制备了Pt/TiO_2、Au/SiO_2、Au/TiO_2-SiO_2等金属分散氧化物薄膜和TiO_2/FeOOH/TiO_2等多层氧化物薄膜。研究了反应条件的优化和组分的分布。对于含Pt氧化物薄膜系统，Pt含量取决于Pt种类。以氨络合物为前驱体的体系中Pt含量高于以H_2PtCl_6为前驱体的体系。 Au 含量取决于反应溶液中 Au 物质 HAuCl_4 的浓度。 Au颗粒均匀分散在基体相中，其直径约为。 10纳米。观察到约 600 nm 处的 VIS 吸收带，该吸收带是由表面等离子体共振引起的。在所制备的TiO_2/FeOOH/TiO_2多层氧化物薄膜中,通过SEM观察可以清楚地观察到各层之间的界面。在界面区域附近，通过XPS测量观察组成梯度。我们还测量了LPD法制备的TiO_2薄膜的催化活性。乙醛变形反应的最大催化活性在300。C下观察到。

The metal dispersed oxide thin films such as, Pt/TiO_2, Au/SiO_2, Au/TiO_2-SiO_2, etc., and multi-layered oxide films such as TiO_2/FeOOH/TiO_2 etc., were prepared. The optimization of the reaction condition and the distribution of the components were investigated. For the system Pt-containing oxide thin films, the Pt content depended on the Pt species. The Pt content for the system using ammine complex as the precursor was larger than that for the system using H_2PtCl_6. The Au content depended on the concentration of Au species, HAuCl_4, in the reacting solution. The Au particle dispersed homogeneously in the matrix phase and its diameter is ca. 10 nm. The VIS absorption band at ca 600 nm was observed and caused by the surface plasmon resonance. In the prepared TiO_2/FeOOH/TiO_2 multi-layered oxide thin film, the interface between each layer was distinctly observed by SEM observation. Near the interfacial region, the composition gradient was observed by XPS measurement. We also measured the catalytic activity of TiO_2 thin film prepared by LPD method. Maximum catalytic activity for the deformation reaction of acetaldehyde is observed at 300。C.