A Development of the Novel Method of Multi-component Metal Oxide Thin Films from Aqueous Solution Process and the Composition Distribution in the Films

制备了Pt/TiO_2、Au/SiO_2、Au/TiO_2-SiO_2等金属分散氧化膜和TiO_2/FeOOH/TiO_2等多层氧化膜。研究了反应条件的优化及反应组分的分布。对于体系含Pt氧化物薄膜，Pt的含量取决于Pt的种类。以胺配合物为前驱体的体系Pt含量高于以H_2PtCl_6为前驱体的体系。Au的含量取决于反应溶液中Au组分HAuCl_4的浓度。金颗粒均匀分布在基体相中，其直径约为10 nm。在约600 nm处观察到由表面等离子体共振引起的VIS吸收带。在制备的TiO_2/FeOOH/TiO_2多层氧化薄膜中，SEM观察到各层之间的界面清晰。在界面附近，用XPS测量了组分梯度。并对LPD法制备的TiO_2薄膜的催化活性进行了测试。在300℃时观察到乙醛变形反应的最大催化活性。

The metal dispersed oxide thin films such as, Pt/TiO_2, Au/SiO_2, Au/TiO_2-SiO_2, etc., and multi-layered oxide films such as TiO_2/FeOOH/TiO_2 etc., were prepared. The optimization of the reaction condition and the distribution of the components were investigated. For the system Pt-containing oxide thin films, the Pt content depended on the Pt species. The Pt content for the system using ammine complex as the precursor was larger than that for the system using H_2PtCl_6. The Au content depended on the concentration of Au species, HAuCl_4, in the reacting solution. The Au particle dispersed homogeneously in the matrix phase and its diameter is ca. 10 nm. The VIS absorption band at ca 600 nm was observed and caused by the surface plasmon resonance. In the prepared TiO_2/FeOOH/TiO_2 multi-layered oxide thin film, the interface between each layer was distinctly observed by SEM observation. Near the interfacial region, the composition gradient was observed by XPS measurement. We also measured the catalytic activity of TiO_2 thin film prepared by LPD method. Maximum catalytic activity for the deformation reaction of acetaldehyde is observed at 300。C.