In-situ analysis of the growing surface by two dimensional detection of x-ray scattering at small glancing angle incidence

当x射线以掠入射角照射材料表面时，可以探测到包含材料表层结构信息的散射x射线。通过分析散射x射线的入射角与信息的依赖关系，利用x射线的穿透深度随入射角的变化而变化，估计了材料表层深度方向的结构变化。为了分析镜面反射x射线随表面逐层增长的强度振荡，基于散射的运动学理论和动力学理论对一些表层模型进行了模拟。在此基础上，构建了新的散射x射线强度二维分布测量系统。利用该系统观测了晶体生长过程中表面散射x射线强度的二维角分布，并从另一个角度估计了镜面反射x射线和散射x射线的强度分布。设计了一种基于CCD元件的x射线能量和强度二维检测系统，并利用该系统检测了几种样品表面散射x射线的分布。通过对探测到的x射线分布进行微分运算，可以得到探测到的x射线的高空间分辨率。推导出用于光子能量测量的CCD单单元单元中，使x射线的1个光子的光量照射在CCD上的合适测量条件，可以检测出散射x射线的1个光子计数。

When x-rays are applied to the material surface at a grazing angle of incidence, the scattered x-rays including many information of structure on the surface layer are detectable. We estimated the structural change of the depth direction of a material surface layer by analyzing incidence angle dependence of the information that the scattered x-rays have, using that the penetration depth of x-rays changes by changing an incidence angle.For analyzing the intensity oscillation of the specularly reflected x-ray with the layer-by-layer growth of the surface the simulation about some surface layer models was performed based on both of kinematical theory and dynamical theory of scattering. Then we constructed new measurement system of two dimensional distribution of scattered x-ray intensity. By this system we observed the two dimensional angular distribution of scattered x-ray intensity from the surfaces during crystal growth, and we estimated the intensity distribution of the specularly reflected x-rays and the scattered x-rays at another angle.An x-ray energy and intensity two-dimensional detection system used a CCD element was designed, and using this system we detected distribution of scattered x-ray from several kind of specimen surfaces. It was found out that high space resolution of the detected X-ray could be derived by differential operation of the detected x-ray distribution. The suitable measurement condition of CCD to make the amount of light of 1 photon of the X-ray shine in 1 element cell of CCD for the energy measurement of photon was derived, and one photon count of scattered x-ray could be detected.