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Real time analysis on the growing crystal surface by X-ray scattering at small glancing angle incidence

通过小掠射角入射时的 X 射线散射对生长晶体表面进行实时分析

基本信息

批准号：
11650016
负责人：
FUJII Yoshikazu
金额：
$ 2.37万
依托单位：
Kobe University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-11650016/
关键词：
X-ray scattering at small glancing angle crystal growth X-ray CCD camera surface step in-situ observation ultrahigh vacuum X-ray energy two-dimensional detection system PbSe (111) crystal surface 微小角入射X線散乱

项目摘要

We have performed in situ observation of the epitaxial growth of PbSe (111) surfaces, and the oscillation of the specularly reflected X-ray intensity showing the layer-by-layer growth of the surface was successfully observed even using a rotating-anode source. But the amplitudes of the oscillation were very small to utilize the monitor of crystal growth. Then we constructed a new measurement system of two-dimensional angular distribution of scattered x-ray energy. We also estimated the intensity ratios between the specularly reflected X-rays and the scattered X-rays at another angle.About various incident angles and various scattered angels, the amplitudes of the intensity oscillations were calculated with simulation models based on dynamical scattering theory. The most suitable condition that the amplitude of the oscillation of the scattered X-ray intensity grew big was looked for. The amplitude grew the biggest at the incident angle as same as the critical angle of the total reflection as that result."An x-ray energy two-dimensional detection system" was designed and started. The X-ray distribution that it was scattered from the surface of the iron was measured with three kinds of detection vessels of SC, SSD and the X-ray energy two-dimensional detection system, which used a CCD element, and a comparative experiment was done. To make the amount of light of 1 photon of the X-ray shine in 1 element cell of CCD, it was found out that energy of the detected X-ray could be measured. And, the idea for the most suitable measurement condition of CCD for the energy measurement of photon, dark electric current noise to be reduced was asked. Moreover, some experiments by CCD of the X-ray were done, and the possibility of the new X-ray microscope, which can be observed the surface of the material, was found.

我们对PbSe（111）表面的外延生长进行了原位观察，即使使用旋转阳极源也成功地观察到了显示表面逐层生长的镜面反射X射线强度的振荡。但振荡的幅度非常小，无法用于晶体生长的监测。然后我们构建了一个新的散射X射线能量二维角分布测量系统。我们还估计了另一个角度下镜面反射X射线与散射X射线之间的强度比。对于不同的入射角和不同的散射角度，利用基于动态散射理论的模拟模型计算了强度振荡的幅度。寻找散射X射线强度振荡幅度变大的最合适条件。结果表明，在与全反射临界角相同的入射角处振幅最大。“X射线能量二维探测系统”的设计与启动。采用SC、SSD三种探测容器和采用CCD元件的X射线能量二维探测系统测量了铁表面散射的X射线分布，并进行了对比实验。为了使X射线的1个光子的光量照射到CCD的1个元件单元中，发现可以测量检测到的X射线的能量。并且，提出了最适合光子能量测量的CCD测量条件、减少暗电流噪声的想法。此外，还利用X射线CCD进行了一些实验，发现了新型X射线显微镜观察材料表面的可能性。