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Investigation of the growing surfaces of crystal by X-ray scattering at small glancing angle incidence

通过小掠射角入射的 X 射线散射研究晶体生长表面

基本信息

批准号：
07650015
负责人：
FUJII Yoshikazu
金额：
$ 1.28万
依托单位：
Kobe University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07650015/
关键词：
ultrahigh vacuum surface X-ray crystal crystal growth X-ray scattering at small glancing angle incidence surface step surface roughness

项目摘要

A compact ultrahigh-vacuum X-ray diffractometer was designed and constructed using a small rotating-anode X-ray source of 18kW.Its UHV specimen chamber is 200mm high and 140mm in diameter and can be evacuated up to 3*10^<-8> Pa. The X-ray is incident into the chamber through a thin Be window, 0.2mm thick and 30mm in diameter. Diffracted and scattered X-rays are taken out through another Be window, 0.4mm thick and 60mm in diameter. All the equipments, a rotating-anode X-ray source, an incident monochromator, and a two-circle diffractometer onto which a UHV specimen chamber and a conventional scintillation counter are mounted, are arranged on only one optical table, 70cm wide and 90cm in length. Configuration of the specimen holder in the chamber, which is designed for the surface glancing angle scatterings at present, can be controlled from outside of the vacuum. The UHV chamber has two evaporation cells for specimen preparation and a heater to anneal the specimen. This arrangement allows us to perform in situ observations of the growing crystal surfaces during the deposition by means of glancing angle X-ray scattering method.A preliminary experiment of the glancing angle scattering of mechanically polished silver polycrystal surfaces gave an order of 10^3 count・sec^<-1> of scattered X-rays intensity at its specular reflection angle, which is enough to derive a significant interpretation of the surface structure.The next experiment was estimation of the growing surface of PbSe (111) by means of glancing angle X-ray scattering method. We success to perform in situ observation of layr-by-layr growth of PbSe (111) by surface X-ray scattering with the use of X-ray from the small rotating-anode X-ray source of 18kW.

采用18kW小型旋转阳极X射线源设计建造了一台紧凑型超高真空X射线衍射仪。其超高真空样品室高200mm，直径140mm，抽真空可达3*10^<-8>Pa。X射线通过0.2mm厚、直径30mm的薄铍窗入射到样品室。衍射和散射X射线通过另一个0.4毫米厚、直径60毫米的铍窗口取出。所有设备，包括旋转阳极X射线源、入射单色仪和安装有特高压样品室和传统闪烁计数器的两圆衍射仪，都布置在一张宽70厘米、长90厘米的光学台上。目前设计用于表面掠射角散射的样品架在腔室中的配置可以从真空外部进行控制。特高压室有两个用于制备样品的蒸发室和一个用于对样品进行退火的加热器。这种布置使我们能够通过掠射角X射线散射方法对沉积过程中生长的晶体表面进行原位观察。机械抛光银多晶表面的掠射角散射的初步实验给出了其镜面反射角处的散射X射线强度的10^3计数·秒^<-1>量级，这足以得出对表面结构的重要解释。通过掠射角X射线散射法估计了PbSe（111）的生长表面。利用18kW小型旋转阳极X射线源的X射线，成功地通过表面X射线散射原位观察了PbSe（111）的逐层生长。