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Nondestructive evaluation of thin layers and films by a Brillouin scattering spectroscopy

通过布里渊散射光谱对薄层和薄膜进行无损评估

基本信息

批准号：
13650469
负责人：
MATSUKAWA Mami
金额：
$ 2.11万
依托单位：
DOSHISHA UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

项目摘要

The purpose of this project is to achieve the nondestructive evaluation of elastic properties in thin metal layers and polymer films by a Brillouin scattering spectroscopy, which cannot have been performed by the conventional ultrasonic techniques. By introducing new measurement apparatus and precise temperature control, we could succeed in long time and continuous measurement of sample velocity, under different physical conditions such as temperature and stress.A continuous measurement of longitudinal wave velocity in thin polymer films (thickness several microns) could be performed by using the 90A optical geometry and tensile test apparatus. The ultra-drawing process in a film was clearly observed as an increase of velocity and showed the appearance of anisotropy. By changing the polarization of incident laser light, we also succeeded in the continuous and nondestructive measurement of birefringence in a film. This method was also applied to the evaluation of adhesive polymer layer under the tensile stress.As for Sic nano layers on the Si wafer, the very weak Brillouin scattering peaks owing to the surface Rayleigh waves could be observed. Although the thickness of the layer was much smaller than the wavelength of the light, the Rayleigh wave velocity clearly depended on the crystalline structure of Sic layer, showing the similar behavior with the velocity of bulk Sic. The scattering peaks of Surface wave were also clearly observed from the one dimensionally aligned ZnO layer on glass plate, showing the anisotoropy of the layer.

本项目的目的是通过布里渊散射光谱实现薄金属层和聚合物膜的弹性特性的无损评估，这不能通过常规的超声技术进行。通过引入新的测量仪器和精确的温度控制，实现了在不同温度和应力等物理条件下对样品纵波速度的长时间连续测量，并利用90 A光学几何拉伸实验装置实现了对聚合物薄膜（厚度为几微米）纵波速度的连续测量。薄膜中的超拉伸过程被清楚地观察到为速度的增加，并显示出各向异性的外观。通过改变入射激光的偏振态，我们还成功地实现了薄膜双折射的连续无损测量。该方法也被应用到拉伸应力下的粘合聚合物层的评估中，对于Si晶片上的SiC纳米层，可以观察到由表面瑞利波引起的非常弱的布里渊散射峰。尽管SiC层的厚度远小于光波长，但瑞利波的传播速度明显依赖于SiC层的晶体结构，表现出与体相SiC的传播速度相似的行为。在玻璃板上的一维取向ZnO层上也观察到了表面波散射峰，表明了ZnO层的各向异性。