Development of Brillouin scattering technique to characterize minute spatial distribution of elastic properties of thin films.

开发布里渊散射技术来表征薄膜弹性特性的微小空间分布。

• 批准号: 16360209
• 负责人: MATSUKAWA Mami
• 金额: $ 3.26万
• 依托单位: Doshisha University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2004
• 资助国家: 日本
• 起止时间: 2004 至 2006
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-16360209/
• 关键词: Brillouin scattering; Elastic properties; thin film; microscopic observation; wave velocity; longitudinal wave; shear wave

In order to realize the non-destructive and non-contact Brillouin scattering measurement technique for the characterization of elastic property distribution in thin films, following studies were performed by the support of this program.The microscopic system for Raman scattering was applied to this optical system and realized the measurement with the spatial resolution of 10 micron meter. The introduction of Reflection Induced theta A (RIGA) scattering also enabled the simultaneous measurements of the light scatterings from hypersonic longitudinal and shear phonons. The degradation of sample surfaces by the laser irradiation was not observed.In addition to the improvement of signal to noise ratio at the photon counting part, we have tried to amplify the scattering light intensity making use of the induced hypersonic waves in the sample. Especially, we made effort to amplify the very weak light scattering from thermal shear phonons. For this purpose, we have fabricated the uniaxially oriented ZnO polycrystallites films on the sample by magnetron sputtering. We have then succeeded in fabricating the film whose resonant frequency is around several hundreds MHz. Making use of the higher resonance mode of this film, shear waves in the GHz range was successfully emitted to the samples. These coherent hypersonic waves were observed as a very intensive Brillouin scattering peak in the measured data, showing the asymmetric spectra. The intensive peak shortened the necessary time to observe the scattering in the sample and improved the signal to noise ratio and the measurement precision.For the automatic measurement of this microscopic Brilllouin scattering, the automatic position control system of the sample holder was constructed. In addition, the attached CCD in the microscopic system can give us the information of optical microscopic image of the measured area.

为了实现布里渊散射非破坏、非接触测量薄膜弹性特性分布的技术，在本项目的支持下，开展了以下研究：将拉曼散射显微系统应用于该光学系统，实现了10 μ m空间分辨率的测量。反射诱导theta A（RIGA）散射的引入也使得能够同时测量来自高超音速纵、剪切声子的光散射。除了提高光子计数部分的信噪比外，我们还尝试利用在样品中诱导的高超声波来放大散射光强度。特别是，我们努力放大热剪切声子的非常微弱的光散射。为此，我们采用磁控溅射法在样品上制备了单轴取向的ZnO多晶薄膜。然后，我们成功地制造了其谐振频率约为几百MHz的薄膜。利用该薄膜的高共振模式，成功地向样品发射了GHz范围内的剪切波。这些相干高超声波在测量数据中被观察到非常强烈的布里渊散射峰，显示出不对称的光谱。为了实现这种显微布里渊散射的自动测量，构建了样品保持器的自动位置控制系统。此外，显微系统中的CCD可以提供被测区域的光学显微图像信息。

项目成果

Formation of uniaxially (1 1 2¯ 0) textured ZnO films on glass substrates

• DOI: 10.1016/j.jcrysgro.2004.12.013
• 发表时间: 2005-04
• 期刊: Journal of Crystal Growth
• 影响因子: 1.8
• 作者: T. Yanagitani;M. Matsukawa;Yoshiaki Watanabe;T. Otani

Effect of sputtering geometry on (11-20) textured ZnO piezofilm

溅射几何形状对 (11-20) 织构 ZnO 压电薄膜的影响

• 发表时间: 2006
• 期刊: Acoust.Sci. & Tech. 27
• 作者: Miyamoto;Yanagitani;Matsukawa;Watanabe
• 通讯作者: Watanabe

Application of Brillouin scattering to the local anisotropy and birefringence measurements of thin layers

布里渊散射在薄层局部各向异性和双折射测量中的应用

• 发表时间: 2006
• 期刊: Ultrasonics Vol.44
• 作者: Matsukawa;Shintani;Tomohiro;Ohtori
• 通讯作者: Ohtori

Electromechanical coupling coefficient k15 and crystallites alignment of(11-20)textured ZnO films

(11-20)织构ZnO薄膜的机电耦合系数k15和微晶排列

• 发表时间: 2006
• 期刊: Proceedings of 2006 IEEE Ultrasonic symposium
• 作者: T.Yanagitani;M.Kiuchi;M.Matsukawa;Y.Watanabe
• 通讯作者: Y.Watanabe

Characteristics of (10-10) and (11-20) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges

VHF-UHF 频率范围内剪切模式谐振器的 (10-10) 和 (11-20) 织构 ZnO 压电膜的特性

• 发表时间: 2005
• 期刊: IEEE transaction of ultrasonics, ferroelectrics and frequency control Vol.52
• 作者: Yanagitani;Nohara;Matsukawa;Watanabe;Otani
• 通讯作者: Otani