General electromagnetic model of active plasma resonance spectroscopy and its application to spatiotemporal electron density and temperature measurements of nanodusty plasmas

微波方法对于等离子体的非侵入性诊断是非常好的。与经典的干涉测量方法相比，利用等离子体腔(腔)的腔共振的方法是非常敏感的，可以使用高达10^7m^(-3)的电子密度。利用当今可用的数学方法和微波测量技术，可以设计出允许空间分辨电子密度测量及其实验验证的方法。通过对具有多个微波接收和发射天线的实际腔体的详细模拟，还可以确定电子温度。在这个项目中，发展了一种微波共振光谱，它允许任意形状的空腔，并能够在空间上确定电子密度。为了确定电子温度，需要对实际腔进行精确的模拟，以区分腔质量引起的共振展宽和温度效应引起的共振展宽。后者可用该方法的动力学模型进行测定。从模型出发，发展了适用于各种低温等离子体的诊断方法。对于纯Ar等离子体，新的微波诊断可以与空间分辨朗缪尔探测器测量进行比较。在含有纳米粒子以及离子和电子的纳米尘埃等离子体中，新的诊断方法首次允许测试尘埃密度波诊断。即使对于反应性的纳米粒子产生的等离子体，新的方法也可以应用于对粒子生长过程中的电子密度进行空间分辨测量，这在以前是不可能的。

Microwave methods are excellent for non-invasive diagnostics of plasmas. Compared to classical interferometry, methods that exploit the cavity resonances of plasma chambers (cavities) are very sensitive and can be used up to electron densities of 10^7 m^(-3). With the mathematical methods and microwave measurement techniques available today, methods can be devised that allow spatially resolved electron density measurements and their experimental verification. The detailed simulation of real cavities with a number of microwave receiving and transmitting antennas also allows the determination of the electron temperature. In this project a microwave resonance spectroscopy is developed, which allows arbitrarily shaped cavities and enables the spatially resolved determination of the electron density. To determine the electron temperature, the accurate simulation of the real cavities is required to separate the broadening of the resonances due to the cavity quality from that due to temperature effects. The latter can be determined with the kinetic model of the method. From the models, diagnostic methods are developed that are applied to various low-temperature plasmas. For pure argon plasmas, the new microwave diagnostic can be compared with spatially resolved Langmuir probe measurements. In nanodusty plasmas, which contain nanoparticles as well as ions and electrons, the new diagnostic allows to test dust density wave diagnostics for the first time. Even for reactive, nanoparticle-generating plasmas, the new method can be applied to perform spatially resolved measurements of electron density during particle growth, which has not been possible before.