General electromagnetic model of active plasma resonance spectroscopy and its application to spatiotemporal electron density and temperature measurements of nanodusty plasmas

主动等离子体共振光谱的一般电磁模型及其在纳米尘埃等离子体时空电子密度和温度测量中的应用

• 批准号: 531667910
• 负责人: Privatdozent Dr. Franko Greiner
• 金额: --
• 依托单位: Fachbereich Elektrische Energietechnik
• 依托单位国家: 德国
• 项目类别: Research Grants
• 资助国家: 德国
• 项目状态: 未结题
• 来源: https://gepris.dfg.de/gepris/projekt/531667910?language=en
• 关键词: General; electromagnetic; model; active; plasma

Microwave methods are excellent for non-invasive diagnostics of plasmas. Compared to classical interferometry, methods that exploit the cavity resonances of plasma chambers (cavities) are very sensitive and can be used up to electron densities of 10^7 m^(-3). With the mathematical methods and microwave measurement techniques available today, methods can be devised that allow spatially resolved electron density measurements and their experimental verification. The detailed simulation of real cavities with a number of microwave receiving and transmitting antennas also allows the determination of the electron temperature. In this project a microwave resonance spectroscopy is developed, which allows arbitrarily shaped cavities and enables the spatially resolved determination of the electron density. To determine the electron temperature, the accurate simulation of the real cavities is required to separate the broadening of the resonances due to the cavity quality from that due to temperature effects. The latter can be determined with the kinetic model of the method. From the models, diagnostic methods are developed that are applied to various low-temperature plasmas. For pure argon plasmas, the new microwave diagnostic can be compared with spatially resolved Langmuir probe measurements. In nanodusty plasmas, which contain nanoparticles as well as ions and electrons, the new diagnostic allows to test dust density wave diagnostics for the first time. Even for reactive, nanoparticle-generating plasmas, the new method can be applied to perform spatially resolved measurements of electron density during particle growth, which has not been possible before.

微波方法对于等离子体的非侵入性诊断是极好的。与经典的干涉测量相比，利用等离子体腔（腔）共振的方法非常灵敏，可用于高达10^7 m^（-3）的电子密度。随着数学方法和微波测量技术的今天，可以设计的方法，允许空间分辨电子密度测量和实验验证。详细的模拟真实的腔与微波接收和发射天线的数量也允许的电子温度的测定。在这个项目中，微波共振光谱学的发展，它允许任意形状的空腔，并使空间分辨的电子密度的测定。为了确定电子温度，需要对真实的腔进行精确的模拟，以将由于腔质量引起的共振展宽与由于温度效应引起的共振展宽分开。后者可以用该方法的动力学模型来确定。从模型，诊断方法的开发，适用于各种低温等离子体。对于纯氩等离子体，新的微波诊断可以与空间分辨的朗缪尔探针测量。在含有纳米粒子以及离子和电子的纳米尘埃等离子体中，新的诊断允许首次测试尘埃密度波诊断。即使对于反应性的纳米粒子生成等离子体，新方法也可以应用于在粒子生长过程中进行空间分辨的电子密度测量，这在以前是不可能的。