Preparation of Optical waveguide in glass by multi-electrodes field-assisted ion excahnge

多电极场辅助离子交换制备玻璃光波导

• 批准号: 14550664
• 负责人: YANO Tetsuji
• 金额: $ 2.18万
• 依托单位: TOKYO INSTITUTE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14550664/
• 关键词: Field-assisted ion exchange; glass; Multi-electrodes; Optical waveguide; Concentration profile; イオン交換; 電界印加; 光損失

Multi-electrodes field-assisted ion exchange was applied to the preparation of optical waveguide in glass and the effects of the field gradient in glass by the multi-electrodes on the diffusion of Ag^+ ions were investigated. Photolithography technique was used to fabricate Ag fire for the core of the optical waveguide and Pt or Au thin films for the bias electrodes on Na/K mixed alkali silicate glass. DC50V was applied to Ag fire while the bias voltage at Pt or Au electrodes was changed from 0 to 500V. After the multi-electrodes field-assisted ion exchange at 300℃, the core profiles were analyzed using optical microscope, backscattering electron microscope and energy dispersive X-ray analysis method. With increasing bias bias voltage, the increment of the core width was decreased effectively. The electric field gradient under Ag fire was influenced largely by the filed form the bias electrode, and the diffusion of monovalent ions (Ag^+,Na^+,K^+) changed. The current conducting through Ag^+ wire showed a constant value while that through the bias electrodes was decrease gradually, because the alkali ions under the bias electrodes decreased with the treatment time. under Ag wire and control the diffusion of Ag^+ in glass. The use of the solid-state electrolyte to supply monovalent ions into the glass would be favorable to attain the fabrication of low-loss optical waveguide.

将多电极场辅助离子交换技术应用于玻璃光波导的制备，研究了多电极场梯度对Ag +离子扩散的影响。采用光刻技术在Na/K混合碱硅酸盐玻璃上制备了用于光波导核心的Ag薄膜和用于偏置电极的Pt或Au薄膜。在Ag火上施加DC50V，将Pt或Au电极的偏置电压从0变到500V。在300℃下进行多电极场辅助离子交换后，利用光学显微镜、后向散射电子显微镜和能量色散x射线分析方法对岩心剖面进行了分析。随着偏置电压的增大，铁心宽度的增量有效减小。Ag火下的电场梯度受偏压电极场的影响较大，单价离子（Ag^+,Na^+,K^+）的扩散发生了变化。Ag +导线的导电电流呈恒定值，而通过偏压电极的导电电流逐渐减小，这是由于偏压电极下的碱离子随着处理时间的延长而减少。控制Ag^+在玻璃中的扩散。利用固态电解质向玻璃中提供单价离子，有利于实现低损耗光波导的制备。

项目成果

海江田智, 矢野哲司, 柴田修一: "多電極電界印加イオン交換による光導波路の作製"第42回セラミックス基礎科学討論会講演要旨集. 230-231 (2004)

Satoshi Kaieda、Tetsuji Yano、Shuichi Shibata：“利用多电极电场和离子交换制造光波导”第 42 届陶瓷基础科学会议摘要 230-231（2004 年）。

F.Fubabiki, T.Yano et al.: "Electrical conductivity of Ag^+/Na^+ ion-exchanged titanosilicate glasses"Solid State Ionics. 160. 281-288 (2003)

F.Fubabiki、T.Yano 等人：“Ag ^ /Na ^ 离子交换钛硅酸盐玻璃的电导率”固态离子学。

F.Fuji, T.Yano, S.Shibata, M.Yamane: "Electrical conductivity of Ag^+/Na^+ ion-exchanged titanosilicate glasses"Solid State Ionics. 160. 281-288 (2003)

F.Fuji、T.Yano、S.Shibata、M.Yamane：“Ag^ /Na^ 离子交换钛硅酸盐玻璃的电导率”固态离子学。

T.Yano et al.: "Ionic conduction and dielectric relaxation of Ag^+/Na^+ ion-exchanged aluminosilicate glasses"Solid State Ionics. 150. 281-290 (2002)

T.Yano 等人：“Ag ^ /Na ^ 离子交换铝硅酸盐玻璃的离子传导和介电弛豫”固态离子学。

T.Yano, T.Nagano, J.Lee, S.Shibata, M.Yamane: "Ionic conduction and dielectric relaxation of Ag^+/Na^+ ion-exchanged aluminosilicate glasses"Solid State Ionics. 150. 281-290 (2002)

T.Yano、T.Nagano、J.Lee、S.Shibata、M.Yamane：“Ag^ /Na^ 离子交换铝硅酸盐玻璃的离子传导和介电弛豫”固态离子学。