Preparation of Optical waveguide in glass by multi-electrodes field-assisted ion excahnge

将多电极场辅助离子交换技术应用于玻璃光波导的制备，研究了多电极场辅助离子交换在玻璃中的场梯度对Ag^+离子扩散的影响。采用光刻技术在Na/K混合碱硅酸盐玻璃上制备了光波导芯层Ag薄膜和偏置电极Pt或Au薄膜。直流50 V施加到银火焰，同时在Pt或Au电极处的偏压从0变化到500 V。采用光学显微镜、背散射电子显微镜和X射线能谱分析方法对300℃下多电极场辅助离子交换后的岩心形貌进行了分析。随着偏置电压的增加，纤芯宽度的增加量有效减小。偏压电极的电场对银焰下的电场梯度影响较大，单价离子（Ag^+、Na^+、K^+）的扩散也发生了变化。Ag^+线的电流随处理时间的延长而趋于恒定，而偏压电极的电流则逐渐减小，这是由于偏压电极下的碱金属离子随着处理时间的延长而减少。控制Ag^+在玻璃中的扩散。利用固态电解质向玻璃中提供一价离子有利于实现低损耗光波导的制备。

Multi-electrodes field-assisted ion exchange was applied to the preparation of optical waveguide in glass and the effects of the field gradient in glass by the multi-electrodes on the diffusion of Ag^+ ions were investigated. Photolithography technique was used to fabricate Ag fire for the core of the optical waveguide and Pt or Au thin films for the bias electrodes on Na/K mixed alkali silicate glass. DC50V was applied to Ag fire while the bias voltage at Pt or Au electrodes was changed from 0 to 500V. After the multi-electrodes field-assisted ion exchange at 300℃, the core profiles were analyzed using optical microscope, backscattering electron microscope and energy dispersive X-ray analysis method. With increasing bias bias voltage, the increment of the core width was decreased effectively. The electric field gradient under Ag fire was influenced largely by the filed form the bias electrode, and the diffusion of monovalent ions (Ag^+,Na^+,K^+) changed. The current conducting through Ag^+ wire showed a constant value while that through the bias electrodes was decrease gradually, because the alkali ions under the bias electrodes decreased with the treatment time. under Ag wire and control the diffusion of Ag^+ in glass. The use of the solid-state electrolyte to supply monovalent ions into the glass would be favorable to attain the fabrication of low-loss optical waveguide.