Preparation of Optical waveguide in glass by multi-electrodes field-assisted ion excahnge

将多电极场助离子交换技术应用于玻璃光波导的制备，研究了多电极电场梯度对玻璃中银离子扩散的影响。采用光刻技术在Na/K混合碱式硅酸盐玻璃上制备了用于光波导芯的银火薄膜和用于偏置电极的铂或金薄膜。当铂电极和金电极上的偏置电压从0到500V变化时，在银火上施加DC50V。在300℃的多电极场辅助离子交换后，用光学显微镜、背散射电子显微镜和能量色散X射线分析方法分析了磁芯的形貌。随着偏置电压的增大，磁芯宽度的增量有效减小。银火作用下的电场梯度受偏置电极电场的影响较大，单价离子(Ag、Na、K)的扩散也发生了变化。随着处理时间的延长，通过银丝的电流呈恒定值，而通过偏置电极的电流逐渐减小，这是因为偏置电极下的碱性离子减少。在银丝下，控制银在玻璃中的扩散。利用固体电解质向玻璃中提供单价离子，有利于实现低损耗光波导的制作。

Multi-electrodes field-assisted ion exchange was applied to the preparation of optical waveguide in glass and the effects of the field gradient in glass by the multi-electrodes on the diffusion of Ag^+ ions were investigated. Photolithography technique was used to fabricate Ag fire for the core of the optical waveguide and Pt or Au thin films for the bias electrodes on Na/K mixed alkali silicate glass. DC50V was applied to Ag fire while the bias voltage at Pt or Au electrodes was changed from 0 to 500V. After the multi-electrodes field-assisted ion exchange at 300℃, the core profiles were analyzed using optical microscope, backscattering electron microscope and energy dispersive X-ray analysis method. With increasing bias bias voltage, the increment of the core width was decreased effectively. The electric field gradient under Ag fire was influenced largely by the filed form the bias electrode, and the diffusion of monovalent ions (Ag^+,Na^+,K^+) changed. The current conducting through Ag^+ wire showed a constant value while that through the bias electrodes was decrease gradually, because the alkali ions under the bias electrodes decreased with the treatment time. under Ag wire and control the diffusion of Ag^+ in glass. The use of the solid-state electrolyte to supply monovalent ions into the glass would be favorable to attain the fabrication of low-loss optical waveguide.